In this study, the transient characteristics on the super-steep subthreshold slope (SS) of a PN-body tied (PNBT) silicon-on-insulator field-effect transistor (SOI-FET) were investigated using technology computer-aided design and pulse measurements. Carrier charging effects were observed on the super-steep SS PNBT SOI-FET. It was found that the turn-on delay time decreased to nearly zero when the gate overdrive-voltage was set to 0.1-0.15 V. Additionally, optimizing the gate width improved the turn-on delay. This has positive implications for the low speed problems of this device. However, long-term leakage current flows on turn-off. The carrier lifetime affects the leakage current, and the device parameters must be optimized to realize both a high on/off ratio and high-speed operation.