An analysis of the phase difference spectrum between two images allows precise image shift detection. Image shifts are directly evaluated from the phase difference spectrum without Fourier inversion. In the calculation, the weight function containing the frequency and the cross spectrum is used and an unlapping procedure is carried out. In an experiment using synthetic and real images of typical image patterns, accuracy as high as 0.01-0.02 pixel was achieved stably and reliably for most of the image patterns.