SQUID (Superconducting QUantum Interference Device) Photoscanning is an analytical technique intended for the noninvasive evaluation of semiconductor wafers and device structures. This method is based on the detection of the magnetic field of photocurrents locally induced in the sample under investigation by a focused laser beam. The magnetic field is monitored by means of a sensitive SQUID magnetometer while scanning the sample surface with the laser beam. Doping inhomogeneities in electronic grade silicon, grain boundaries in solar silicon, and defects in photovoltaic device structures have been analyzed.