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Yoshiro TAKIGUCHI Katsunori OSADA Masakazu NANBA Kazunori MIYAKAWA Saburo OKAZAKI Toshio YAMAGISHI Kenkichi TANIOKA Masahide ABE Norifumi EGAMI Mitsuru TANAKA Shigeo ITOH
To investigate the feasibility of a compact FEA image sensor with a large number of pixels, a 128 96 pixel FEA image sensor with a 4-µm-thick HARP target was fabricated and tested for the first time. The experimental results showed that the prototype could stably operate as a highly sensitive image sensor having both sufficient resolution corresponding to the number of pixels and a wide dynamic range, which demonstrated its potential as a next-generation image sensor.