Self-dithered digital delta-sigma modulators (DDSMs) are commonly used in fractional-N frequency synthesizers due to their ability to eliminate unwanted spurs from the synthesizer’s spectra without requiring additional hardware. However, when operating with a low-bit input, self-dithered DDSMs can still suffer from spurious tones at certain inputs. In this paper, we propose a self-dithered MASH 1-1-1-1 structure to mitigate the spur issue in the self-dithered MASH DDSMs. The proposed self-dithered MASH 1-1-1-1 suppresses the spurs with shaped dithering and achieves 4th order noise shaping.