A micro reactor array for biochemical or biomedical use was developed. Conceptof this development is to get as much as biological data at the same time. Ninety-six micro reaction wells, volume of each well was 1.5 µl, were integrated in the array. The micro reactor array was fabricated on 1 mm thick silicon wafer and twelve pairs of a temperature sensor and a heater were formed on the backside. A tiny transparent window for optical measurement was formed at the center of bottom wall on each well. Several temperature gradients were applied to the array by means of few heaters and compared with simulation results to optimize the parameters. Finally, performance of the array was evaluated by basic DNA reaction. Advantages of the array system are the fast thermal response due to the small heat capacity and easy to make several reaction conditions in parallel.

We developed piezoresistors with an intrinsic compensation of the offset temperature characteristics. High energy ion implantation was applied to fabricate this type of piezoresistor. The dopant profile of the buried piezoresistor resembles to that of the junction gate field effect transistor (JFET). The buried layer corresponds to a channel of JFET, and the substrate bias corresponds to the gate voltage. Owing to the independent temperature varying parameters, i.e., width of the depletion layer and carrier mobility in the channel, the drain current of the JFET has a temperature independent point at an appropriate gate source voltage. The effect was used in the new type of buried piezoresistor which has a driving point of zero temperature coefficient of resistance at an appropriate gate source voltage.

We report a real time method to monitor the chemical reaction in microdroplets, which contain an organic dye, 5(6)-carboxynaphthofluorescein and a CdSe/ZnS quantum dot using fluorescence spectra. Especially, the relationship between the droplet size and the reaction rate of the two reagents was investigated by changing an injection speed.