We describe the fabrication method and characteristics of hybrid external cavity lasers composed of a spot-size converter integrated LD (SS-LD) and a UV written Bragg grating in a planar lightwave circuit (PLC) on a Si substrate. The SS-LD is passively aligned on a Si platform formed in the PLC, and the UV grating is created in the PLC with ArF laser irradiation through a phase mask. This structure enables us to fabricate a stable single-mode laser with a precisely controllable oscillation wavelength. By using the above techniques, we obtained a threshold current of 7-8 mA and a side mode suppression of 37 dB for an external cavity laser operating at 1.3 µm. Moreover, we successfully demonstrated a four-channel external cavity laser with a wavelength interval of 2 nm 0.1 nm by integrating 4 SS-LDs on a PLC and controlling the Bragg wavelengths with ArF laser irradiation without a phase mask.

Planar lightwave circuits (PLCs) provide various important devices for optical wavelength division multiplexing (WDM) systems, subscriber networks and etc. This paper reviews the recent progress and future prospects of PLC technologies including arrayed-waveguide grating multiplexers, optical add/drop multiplexers, programmable dispersion equalizers and hybrid optoelectronics integration technologies.