Design of 1 m<SUP>2</SUP> Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis

Takuichi HIRANO; Kimio SAKURAI; Jiro HIROKAWA; Makoto ANDO; Tetsuya IDE; Atsushi SASAKI; Kazufumi AZUMA; Yukihiko NAKATA

doi:10.1093/ietcom/e89-b.5.1627

Design of 1 m² Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis

Takuichi HIRANO, Kimio SAKURAI, Jiro HIROKAWA, Makoto ANDO, Tetsuya IDE, Atsushi SASAKI, Kazufumi AZUMA, Yukihiko NAKATA

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The authors have proposed a 1 m² single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.

Publication: IEICE TRANSACTIONS on Communications Vol.E89-B No.5 pp.1627-1635

Publication Date: 2006/05/01

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Online ISSN: 1745-1345

DOI: 10.1093/ietcom/e89-b.5.1627

Type of Manuscript: PAPER

Category: Antennas and Propagation

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Takuichi HIRANO, Kimio SAKURAI, Jiro HIROKAWA, Makoto ANDO, Tetsuya IDE, Atsushi SASAKI, Kazufumi AZUMA, Yukihiko NAKATA, "Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis" in IEICE TRANSACTIONS on Communications, vol. E89-B, no. 5, pp. 1627-1635, May 2006, doi: 10.1093/ietcom/e89-b.5.1627.
Abstract: The authors have proposed a 1 m² single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.
URL: https://globals.ieice.org/en_transactions/communications/10.1093/ietcom/e89-b.5.1627/_p

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@ARTICLE{e89-b_5_1627,
author={Takuichi HIRANO, Kimio SAKURAI, Jiro HIROKAWA, Makoto ANDO, Tetsuya IDE, Atsushi SASAKI, Kazufumi AZUMA, Yukihiko NAKATA, },
journal={IEICE TRANSACTIONS on Communications},
title={Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis},
year={2006},
volume={E89-B},
number={5},
pages={1627-1635},
abstract={The authors have proposed a 1 m² single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.},
keywords={},
doi={10.1093/ietcom/e89-b.5.1627},
ISSN={1745-1345},
month={May},}

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TY - JOUR
TI - Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
T2 - IEICE TRANSACTIONS on Communications
SP - 1627
EP - 1635
AU - Takuichi HIRANO
AU - Kimio SAKURAI
AU - Jiro HIROKAWA
AU - Makoto ANDO
AU - Tetsuya IDE
AU - Atsushi SASAKI
AU - Kazufumi AZUMA
AU - Yukihiko NAKATA
PY - 2006
DO - 10.1093/ietcom/e89-b.5.1627
JO - IEICE TRANSACTIONS on Communications
SN - 1745-1345
VL - E89-B
IS - 5
JA - IEICE TRANSACTIONS on Communications
Y1 - May 2006
AB - The authors have proposed a 1 m² single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.
ER -