Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range

Takuma NISHIMOTO; Kiichi YAMASHITA; Kenichi OHHATA

doi:10.1093/ietcom/e91-b.2.572

Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range

Takuma NISHIMOTO, Kiichi YAMASHITA, Kenichi OHHATA

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A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2 V; it achieves a tuning range of 4.8:1 (capacitance:630-130 fF) in the range of 0 to 3.2 V and at a frequency of 7.5 GHz.

Publication: IEICE TRANSACTIONS on Communications Vol.E91-B No.2 pp.572-574

Publication Date: 2008/02/01

Publicized

Online ISSN: 1745-1345

DOI: 10.1093/ietcom/e91-b.2.572

Type of Manuscript: LETTER

Category: Devices/Circuits for Communications

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Takuma NISHIMOTO, Kiichi YAMASHITA, Kenichi OHHATA, "Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range" in IEICE TRANSACTIONS on Communications, vol. E91-B, no. 2, pp. 572-574, February 2008, doi: 10.1093/ietcom/e91-b.2.572.
Abstract: A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2 V; it achieves a tuning range of 4.8:1 (capacitance:630-130 fF) in the range of 0 to 3.2 V and at a frequency of 7.5 GHz.
URL: https://globals.ieice.org/en_transactions/communications/10.1093/ietcom/e91-b.2.572/_p

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@ARTICLE{e91-b_2_572,
author={Takuma NISHIMOTO, Kiichi YAMASHITA, Kenichi OHHATA, },
journal={IEICE TRANSACTIONS on Communications},
title={Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range},
year={2008},
volume={E91-B},
number={2},
pages={572-574},
abstract={A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2 V; it achieves a tuning range of 4.8:1 (capacitance:630-130 fF) in the range of 0 to 3.2 V and at a frequency of 7.5 GHz.},
keywords={},
doi={10.1093/ietcom/e91-b.2.572},
ISSN={1745-1345},
month={February},}

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TY - JOUR
TI - Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range
T2 - IEICE TRANSACTIONS on Communications
SP - 572
EP - 574
AU - Takuma NISHIMOTO
AU - Kiichi YAMASHITA
AU - Kenichi OHHATA
PY - 2008
DO - 10.1093/ietcom/e91-b.2.572
JO - IEICE TRANSACTIONS on Communications
SN - 1745-1345
VL - E91-B
IS - 2
JA - IEICE TRANSACTIONS on Communications
Y1 - February 2008
AB - A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2 V; it achieves a tuning range of 4.8:1 (capacitance:630-130 fF) in the range of 0 to 3.2 V and at a frequency of 7.5 GHz.
ER -