Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip

Takuichi HIRANO; Ning LI; Kenichi OKADA

doi:10.1587/transcom.2016EBT0004

Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip

Takuichi HIRANO, Ning LI, Kenichi OKADA

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Summary :

The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.

Publication: IEICE TRANSACTIONS on Communications Vol.E100-B No.5 pp.793-798

Publication Date: 2017/05/01

Publicized: 2016/11/21

Online ISSN: 1745-1345

DOI: 10.1587/transcom.2016EBT0004

Type of Manuscript: PAPER

Category: Antennas and Propagation

Authors

Takuichi HIRANO
  Tokyo Institute of Technology
Ning LI
  Chuo University
Kenichi OKADA
  Tokyo Institute of Technology

Keyword

dummy metal fills, CMOS, effective material property, permittivity, permeability, millimeter-wave

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Takuichi HIRANO, Ning LI, Kenichi OKADA, "Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip" in IEICE TRANSACTIONS on Communications, vol. E100-B, no. 5, pp. 793-798, May 2017, doi: 10.1587/transcom.2016EBT0004.
Abstract: The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.
URL: https://globals.ieice.org/en_transactions/communications/10.1587/transcom.2016EBT0004/_p

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@ARTICLE{e100-b_5_793,
author={Takuichi HIRANO, Ning LI, Kenichi OKADA, },
journal={IEICE TRANSACTIONS on Communications},
title={Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip},
year={2017},
volume={E100-B},
number={5},
pages={793-798},
abstract={The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.},
keywords={},
doi={10.1587/transcom.2016EBT0004},
ISSN={1745-1345},
month={May},}

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TY - JOUR
TI - Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip
T2 - IEICE TRANSACTIONS on Communications
SP - 793
EP - 798
AU - Takuichi HIRANO
AU - Ning LI
AU - Kenichi OKADA
PY - 2017
DO - 10.1587/transcom.2016EBT0004
JO - IEICE TRANSACTIONS on Communications
SN - 1745-1345
VL - E100-B
IS - 5
JA - IEICE TRANSACTIONS on Communications
Y1 - May 2017
AB - The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.
ER -