Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices

Takayuki SHIMAZU; Makoto KATAYAMA; Yoshitada ISONO

doi:10.1093/ietele/e88-c.5.1020

Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices

Takayuki SHIMAZU, Makoto KATAYAMA, Yoshitada ISONO

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This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate λ from experimental results, and the value of Failure in Time (FIT) λ was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage.

Publication: IEICE TRANSACTIONS on Electronics Vol.E88-C No.5 pp.1020-1024

Publication Date: 2005/05/01

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DOI: 10.1093/ietele/e88-c.5.1020

Type of Manuscript: Special Section PAPER (Joint Special Section on Recent Progress in Optoelectronics and Communications)

Category: Optical Passive Devices and Modules

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Takayuki SHIMAZU, Makoto KATAYAMA, Yoshitada ISONO, "Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices" in IEICE TRANSACTIONS on Electronics, vol. E88-C, no. 5, pp. 1020-1024, May 2005, doi: 10.1093/ietele/e88-c.5.1020.
Abstract: This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate λ from experimental results, and the value of Failure in Time (FIT) λ was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage.
URL: https://globals.ieice.org/en_transactions/electronics/10.1093/ietele/e88-c.5.1020/_p

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@ARTICLE{e88-c_5_1020,
author={Takayuki SHIMAZU, Makoto KATAYAMA, Yoshitada ISONO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices},
year={2005},
volume={E88-C},
number={5},
pages={1020-1024},
abstract={This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate λ from experimental results, and the value of Failure in Time (FIT) λ was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage.},
keywords={},
doi={10.1093/ietele/e88-c.5.1020},
ISSN={},
month={May},}

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TY - JOUR
TI - Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices
T2 - IEICE TRANSACTIONS on Electronics
SP - 1020
EP - 1024
AU - Takayuki SHIMAZU
AU - Makoto KATAYAMA
AU - Yoshitada ISONO
PY - 2005
DO - 10.1093/ietele/e88-c.5.1020
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E88-C
IS - 5
JA - IEICE TRANSACTIONS on Electronics
Y1 - May 2005
AB - This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate λ from experimental results, and the value of Failure in Time (FIT) λ was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage.
ER -