Novel Stacked Packaging Structure Using Silica-Based PLC with Integrated Micro-Mirrors and Its Application to 8ch PD Array Module

Ikuo OGAWA; Makoto ABE; Yoshiyuki DOI; Senichi SUZUKI

doi:10.1093/ietele/e88-c.8.1552

Novel Stacked Packaging Structure Using Silica-Based PLC with Integrated Micro-Mirrors and Its Application to 8ch PD Array Module

Ikuo OGAWA, Makoto ABE, Yoshiyuki DOI, Senichi SUZUKI

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We propose and demonstrate a new stacked packaging structure using silica-based planar lightwave circuits (PLCs) with integrated micro-mirrors. This structure enables us to integrate active devices on PLCs with certain flexibility as regards optical coupling design and device selection. To achieve this, we developed an integrated micro-mirror with an accurate reflection angle and shielding structures to prevent crosstalk, and successfully demonstrated an 8-channel photodiode array module with excellent characteristics consisting of a high responsivity of > 0.85 A/W and a low crosstalk of < -65 dB.

Publication: IEICE TRANSACTIONS on Electronics Vol.E88-C No.8 pp.1552-1558

Publication Date: 2005/08/01

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Online ISSN

DOI: 10.1093/ietele/e88-c.8.1552

Type of Manuscript: Special Section PAPER (Special Section on Recent Development of Electro-Mechanical Devices--Selected Papers from International Session on Electro-Mechanical Devices 2004 (IS-EMD2004)--)

Category: Optical Interconnection

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Ikuo OGAWA, Makoto ABE, Yoshiyuki DOI, Senichi SUZUKI, "Novel Stacked Packaging Structure Using Silica-Based PLC with Integrated Micro-Mirrors and Its Application to 8ch PD Array Module" in IEICE TRANSACTIONS on Electronics, vol. E88-C, no. 8, pp. 1552-1558, August 2005, doi: 10.1093/ietele/e88-c.8.1552.
Abstract: We propose and demonstrate a new stacked packaging structure using silica-based planar lightwave circuits (PLCs) with integrated micro-mirrors. This structure enables us to integrate active devices on PLCs with certain flexibility as regards optical coupling design and device selection. To achieve this, we developed an integrated micro-mirror with an accurate reflection angle and shielding structures to prevent crosstalk, and successfully demonstrated an 8-channel photodiode array module with excellent characteristics consisting of a high responsivity of > 0.85 A/W and a low crosstalk of < -65 dB.
URL: https://globals.ieice.org/en_transactions/electronics/10.1093/ietele/e88-c.8.1552/_p

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@ARTICLE{e88-c_8_1552,
author={Ikuo OGAWA, Makoto ABE, Yoshiyuki DOI, Senichi SUZUKI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Novel Stacked Packaging Structure Using Silica-Based PLC with Integrated Micro-Mirrors and Its Application to 8ch PD Array Module},
year={2005},
volume={E88-C},
number={8},
pages={1552-1558},
abstract={We propose and demonstrate a new stacked packaging structure using silica-based planar lightwave circuits (PLCs) with integrated micro-mirrors. This structure enables us to integrate active devices on PLCs with certain flexibility as regards optical coupling design and device selection. To achieve this, we developed an integrated micro-mirror with an accurate reflection angle and shielding structures to prevent crosstalk, and successfully demonstrated an 8-channel photodiode array module with excellent characteristics consisting of a high responsivity of > 0.85 A/W and a low crosstalk of < -65 dB.},
keywords={},
doi={10.1093/ietele/e88-c.8.1552},
ISSN={},
month={August},}

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TY - JOUR
TI - Novel Stacked Packaging Structure Using Silica-Based PLC with Integrated Micro-Mirrors and Its Application to 8ch PD Array Module
T2 - IEICE TRANSACTIONS on Electronics
SP - 1552
EP - 1558
AU - Ikuo OGAWA
AU - Makoto ABE
AU - Yoshiyuki DOI
AU - Senichi SUZUKI
PY - 2005
DO - 10.1093/ietele/e88-c.8.1552
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E88-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 2005
AB - We propose and demonstrate a new stacked packaging structure using silica-based planar lightwave circuits (PLCs) with integrated micro-mirrors. This structure enables us to integrate active devices on PLCs with certain flexibility as regards optical coupling design and device selection. To achieve this, we developed an integrated micro-mirror with an accurate reflection angle and shielding structures to prevent crosstalk, and successfully demonstrated an 8-channel photodiode array module with excellent characteristics consisting of a high responsivity of > 0.85 A/W and a low crosstalk of < -65 dB.
ER -