Automatic Transistor-Level Performance Fault Tracing by Successive Circuit Extraction from CAD Layout Data for VLSI in the CAD-Linked EB Test System

Katsuyoshi MIURA, Koji NAKAMAE, hiromu FUJIOKA

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Summary :

An automatic transistor-level performance fault tracing method is proposed which is applicable to the case where only CAD layout data is available in the CAD-linked electron beam test system. The technique uses an integrated algorithm that combines a previously proposed transistor-level fault tracing algorithm and a successive circuit extraction from CAD layout data. An expansion of the algorithm to the fault tracing in a combined focused ion beam and electron beam test system which enables us to measure signals on the interconnections in the lower layers is also described. An application of the technique to a CMOS model layout with about 100 transistors shows its validity.

Publication
IEICE TRANSACTIONS on Electronics Vol.E78-C No.11 pp.1607-1617
Publication Date
1995/11/25
Publicized
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DOI
Type of Manuscript
PAPER
Category
Integrated Electronics

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