Laser Deposition of Y1Ba2Cu3O7-δ -SrTiO3-Y1Ba2Cu3O7-δ Multilayers Utilizing the 4th Harmonics of Nd:YAG Pulse Laser

Takanobu KISS; Keiji ENPUKU; Tatsuya MATSUMURA; Yasunori IRIYAMA; Taketsune NAKAMURA; Masakatsu TAKEO

Laser Deposition of Y₁Ba₂Cu₃O_7-δ -SrTiO₃-Y₁Ba₂Cu₃O_7-δ Multilayers Utilizing the 4th Harmonics of Nd:YAG Pulse Laser

Takanobu KISS, Keiji ENPUKU, Tatsuya MATSUMURA, Yasunori IRIYAMA, Taketsune NAKAMURA, Masakatsu TAKEO

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The 4th harmonics of a Nd:YAG laser beam (266 nm) is applied to fabricate highly oriented Y₁Ba₂Cu₃O_7-δ -SrTiO₃-Y₁Ba₂Cu₃O_7-δ multilayer structures. It has been shown that the emission temperature of a film surface will change during deposition, depending on deposition conditions, even though the heater temperature is constant. The change of substrate temperature is strongly correlated to film characteristics such as critical temperature, c-axis length, and resistivity. The insitu monitoring of the substrate temperature is useful for obtaining high-quality Y₁Ba₂Cu₃O_7-δ films reproducibly. It is also shown that a SrTiO₃ layer prevents oxygen restoration in a Y₁Ba₂Cu₃O_7-δ underlayer. The relationship between oxygen deficiency and the annealing conditions is studied.

Publication: IEICE TRANSACTIONS on Electronics Vol.E79-C No.9 pp.1269-1273

Publication Date: 1996/09/25

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Type of Manuscript: Special Section PAPER (Special Issue on Toward Digital and Analog Applications of Superconductors)

Category: Device technology

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Takanobu KISS, Keiji ENPUKU, Tatsuya MATSUMURA, Yasunori IRIYAMA, Taketsune NAKAMURA, Masakatsu TAKEO, "Laser Deposition of Y1Ba2Cu3O7-δ -SrTiO3-Y1Ba2Cu3O7-δ Multilayers Utilizing the 4th Harmonics of Nd:YAG Pulse Laser" in IEICE TRANSACTIONS on Electronics, vol. E79-C, no. 9, pp. 1269-1273, September 1996, doi: .
Abstract: The 4th harmonics of a Nd:YAG laser beam (266 nm) is applied to fabricate highly oriented Y₁Ba₂Cu₃O_7-δ -SrTiO₃-Y₁Ba₂Cu₃O_7-δ multilayer structures. It has been shown that the emission temperature of a film surface will change during deposition, depending on deposition conditions, even though the heater temperature is constant. The change of substrate temperature is strongly correlated to film characteristics such as critical temperature, c-axis length, and resistivity. The insitu monitoring of the substrate temperature is useful for obtaining high-quality Y₁Ba₂Cu₃O_7-δ films reproducibly. It is also shown that a SrTiO₃ layer prevents oxygen restoration in a Y₁Ba₂Cu₃O_7-δ underlayer. The relationship between oxygen deficiency and the annealing conditions is studied.
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/e79-c_9_1269/_p

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@ARTICLE{e79-c_9_1269,
author={Takanobu KISS, Keiji ENPUKU, Tatsuya MATSUMURA, Yasunori IRIYAMA, Taketsune NAKAMURA, Masakatsu TAKEO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Laser Deposition of Y1Ba2Cu3O7-δ -SrTiO3-Y1Ba2Cu3O7-δ Multilayers Utilizing the 4th Harmonics of Nd:YAG Pulse Laser},
year={1996},
volume={E79-C},
number={9},
pages={1269-1273},
abstract={The 4th harmonics of a Nd:YAG laser beam (266 nm) is applied to fabricate highly oriented Y₁Ba₂Cu₃O_7-δ -SrTiO₃-Y₁Ba₂Cu₃O_7-δ multilayer structures. It has been shown that the emission temperature of a film surface will change during deposition, depending on deposition conditions, even though the heater temperature is constant. The change of substrate temperature is strongly correlated to film characteristics such as critical temperature, c-axis length, and resistivity. The insitu monitoring of the substrate temperature is useful for obtaining high-quality Y₁Ba₂Cu₃O_7-δ films reproducibly. It is also shown that a SrTiO₃ layer prevents oxygen restoration in a Y₁Ba₂Cu₃O_7-δ underlayer. The relationship between oxygen deficiency and the annealing conditions is studied.},
keywords={},
doi={},
ISSN={},
month={September},}

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TY - JOUR
TI - Laser Deposition of Y1Ba2Cu3O7-δ -SrTiO3-Y1Ba2Cu3O7-δ Multilayers Utilizing the 4th Harmonics of Nd:YAG Pulse Laser
T2 - IEICE TRANSACTIONS on Electronics
SP - 1269
EP - 1273
AU - Takanobu KISS
AU - Keiji ENPUKU
AU - Tatsuya MATSUMURA
AU - Yasunori IRIYAMA
AU - Taketsune NAKAMURA
AU - Masakatsu TAKEO
PY - 1996
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E79-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 1996
AB - The 4th harmonics of a Nd:YAG laser beam (266 nm) is applied to fabricate highly oriented Y₁Ba₂Cu₃O_7-δ -SrTiO₃-Y₁Ba₂Cu₃O_7-δ multilayer structures. It has been shown that the emission temperature of a film surface will change during deposition, depending on deposition conditions, even though the heater temperature is constant. The change of substrate temperature is strongly correlated to film characteristics such as critical temperature, c-axis length, and resistivity. The insitu monitoring of the substrate temperature is useful for obtaining high-quality Y₁Ba₂Cu₃O_7-δ films reproducibly. It is also shown that a SrTiO₃ layer prevents oxygen restoration in a Y₁Ba₂Cu₃O_7-δ underlayer. The relationship between oxygen deficiency and the annealing conditions is studied.
ER -