Application of Millimeter-Wave Heating to Materials Processing

Shoji MIYAKE; Yukio MAKINO

Application of Millimeter-Wave Heating to Materials Processing

Shoji MIYAKE, Yukio MAKINO

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Recently, millimeter-wave energy has attracted much attention as a new and novel energy source for materials processing. In the present paper, several unique features of millimeter-wave heating in materials processing are reviewed briefly and development of materials processing machines by mm-wave radiation is also described. In the application of mm-wave heating, sintering of high quality alumina ceramics having a high bending strength of about 800 MPa are first demonstrated and followed by preparation of aluminum nitride with a high thermal conductivity over 200 W/(mK) at a sintering temperature lower by 473-573 K than the conventional method, by which this processing can be expected to be one of the environment-conscious energy saving processes. A newly developed post-annealing process with mm-wave radiation is described, in which crystallization of amorphous perovskite oxide films prepared by plasma sputtering was attained at temperatures lower than that by the conventional heating and the dielectric constant of post-annealed SrTiO₃ (STO) films by mm-wave radiation were drastically improved.

Publication: IEICE TRANSACTIONS on Electronics Vol.E86-C No.12 pp.2365-2370

Publication Date: 2003/12/01

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Type of Manuscript: Special Section INVITED PAPER (Special Issue on Recent Trends on Microwave and Millimeter Wave Application Technology)

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Shoji MIYAKE, Yukio MAKINO, "Application of Millimeter-Wave Heating to Materials Processing" in IEICE TRANSACTIONS on Electronics, vol. E86-C, no. 12, pp. 2365-2370, December 2003, doi: .
Abstract: Recently, millimeter-wave energy has attracted much attention as a new and novel energy source for materials processing. In the present paper, several unique features of millimeter-wave heating in materials processing are reviewed briefly and development of materials processing machines by mm-wave radiation is also described. In the application of mm-wave heating, sintering of high quality alumina ceramics having a high bending strength of about 800 MPa are first demonstrated and followed by preparation of aluminum nitride with a high thermal conductivity over 200 W/(mK) at a sintering temperature lower by 473-573 K than the conventional method, by which this processing can be expected to be one of the environment-conscious energy saving processes. A newly developed post-annealing process with mm-wave radiation is described, in which crystallization of amorphous perovskite oxide films prepared by plasma sputtering was attained at temperatures lower than that by the conventional heating and the dielectric constant of post-annealed SrTiO₃ (STO) films by mm-wave radiation were drastically improved.
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/e86-c_12_2365/_p

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@ARTICLE{e86-c_12_2365,
author={Shoji MIYAKE, Yukio MAKINO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Application of Millimeter-Wave Heating to Materials Processing},
year={2003},
volume={E86-C},
number={12},
pages={2365-2370},
abstract={Recently, millimeter-wave energy has attracted much attention as a new and novel energy source for materials processing. In the present paper, several unique features of millimeter-wave heating in materials processing are reviewed briefly and development of materials processing machines by mm-wave radiation is also described. In the application of mm-wave heating, sintering of high quality alumina ceramics having a high bending strength of about 800 MPa are first demonstrated and followed by preparation of aluminum nitride with a high thermal conductivity over 200 W/(mK) at a sintering temperature lower by 473-573 K than the conventional method, by which this processing can be expected to be one of the environment-conscious energy saving processes. A newly developed post-annealing process with mm-wave radiation is described, in which crystallization of amorphous perovskite oxide films prepared by plasma sputtering was attained at temperatures lower than that by the conventional heating and the dielectric constant of post-annealed SrTiO₃ (STO) films by mm-wave radiation were drastically improved.},
keywords={},
doi={},
ISSN={},
month={December},}

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TY - JOUR
TI - Application of Millimeter-Wave Heating to Materials Processing
T2 - IEICE TRANSACTIONS on Electronics
SP - 2365
EP - 2370
AU - Shoji MIYAKE
AU - Yukio MAKINO
PY - 2003
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E86-C
IS - 12
JA - IEICE TRANSACTIONS on Electronics
Y1 - December 2003
AB - Recently, millimeter-wave energy has attracted much attention as a new and novel energy source for materials processing. In the present paper, several unique features of millimeter-wave heating in materials processing are reviewed briefly and development of materials processing machines by mm-wave radiation is also described. In the application of mm-wave heating, sintering of high quality alumina ceramics having a high bending strength of about 800 MPa are first demonstrated and followed by preparation of aluminum nitride with a high thermal conductivity over 200 W/(mK) at a sintering temperature lower by 473-573 K than the conventional method, by which this processing can be expected to be one of the environment-conscious energy saving processes. A newly developed post-annealing process with mm-wave radiation is described, in which crystallization of amorphous perovskite oxide films prepared by plasma sputtering was attained at temperatures lower than that by the conventional heating and the dielectric constant of post-annealed SrTiO₃ (STO) films by mm-wave radiation were drastically improved.
ER -