Fabrication of La-Doped YBCO and SrTiO3-Buffered LSAT Thin Films for Ramp-Edge Josephson Junctions on Superconducting Ground Plane

Seiji ADACHI, Hironori WAKANA, Yoshihiro ISHIMARU, Masahiro HORIBE, Yoshinobu TARUTANI, Keiichi TANABE

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Summary :

The deposition conditions of Y0.9Ba1.9La0.2Cu3Oy (La-YBCO) and (LaAlO3)0.3-(SrAl0.5Ta0.5O3)0.7 (LSAT) thin films were studied with the aim of fabricating ramp-edge Josephson junctions on a superconducting ground plane. These films were deposited by a magnetron sputtering method and utilized as a base electrode and an insulating layer under the electrode, respectively. YBa2Cu3Oy thick films grown by liquid phase epitaxy (LPE-YBCO) were used for a ground plane. Insertion of a SrTiO3 buffer layer between LSAT and LPE-YBCO significantly improved the flatness of the film surface. La-YBCO films with a flat surface and Tc (zero) of 87K were reproducibly obtained by DC sputtering. We have fabricated ramp-edge Josephson junctions using these films. Resistively and capacitively shunted junction (RCSJ)-like characteristics were observed in them. An Ic spread of 10.2% (at 4.2K, average Ic = 0.5 mA) was obtained for a 1000-junction series-array.

Publication
IEICE TRANSACTIONS on Electronics Vol.E87-C No.2 pp.206-211
Publication Date
2004/02/01
Publicized
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DOI
Type of Manuscript
Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
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