Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering

Naoki HONDA; Akito HONDA

doi:10.1587/transele.E96.C.1469

Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering

Naoki HONDA, Akito HONDA

Full Text Views

0

Share
Cite this

Summary :

Deposition of inclined anisotropy film for bit-patterned media was studied using an oblique incidence collimated sputtering. Pt underlayer increased the inclination angle of magnetic layer more than 5° on a Ta seed layer. Further increase of the angle was obtained by annealing Pt/Ru underlayer resulting an inclination angle of 9.4° for a Co-Cr_15.5 film on the underlayer. The magnetic properties of the Co-Cr_15.5 film with an inclined orientation was estimated comparing measured hysteresis loops with simulated ones, which indicated to have inclined magnetic anisotropy with an anisotropy field of about 4.5kOe and a deflection angle of the anisotropy about the same as that of the crystalline orientation.

Publication: IEICE TRANSACTIONS on Electronics Vol.E96-C No.12 pp.1469-1473

Publication Date: 2013/12/01

Publicized

Online ISSN: 1745-1353

DOI: 10.1587/transele.E96.C.1469

Type of Manuscript: Special Section PAPER (Special Section on Advanced Elementary Technologies for Information Storage)

Category

Authors

Naoki HONDA
Tohoku Institute of Technology
Akito HONDA
Tohoku Institute of Technology

Keyword

inclined anisotropy, oblique incidence collimated sputtering, patterned media, magnetic properties

Cite this

Copy

Naoki HONDA, Akito HONDA, "Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering" in IEICE TRANSACTIONS on Electronics, vol. E96-C, no. 12, pp. 1469-1473, December 2013, doi: 10.1587/transele.E96.C.1469.
Abstract: Deposition of inclined anisotropy film for bit-patterned media was studied using an oblique incidence collimated sputtering. Pt underlayer increased the inclination angle of magnetic layer more than 5° on a Ta seed layer. Further increase of the angle was obtained by annealing Pt/Ru underlayer resulting an inclination angle of 9.4° for a Co-Cr_15.5 film on the underlayer. The magnetic properties of the Co-Cr_15.5 film with an inclined orientation was estimated comparing measured hysteresis loops with simulated ones, which indicated to have inclined magnetic anisotropy with an anisotropy field of about 4.5kOe and a deflection angle of the anisotropy about the same as that of the crystalline orientation.
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/transele.E96.C.1469/_p

Copy

@ARTICLE{e96-c_12_1469,
author={Naoki HONDA, Akito HONDA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering},
year={2013},
volume={E96-C},
number={12},
pages={1469-1473},
abstract={Deposition of inclined anisotropy film for bit-patterned media was studied using an oblique incidence collimated sputtering. Pt underlayer increased the inclination angle of magnetic layer more than 5° on a Ta seed layer. Further increase of the angle was obtained by annealing Pt/Ru underlayer resulting an inclination angle of 9.4° for a Co-Cr_15.5 film on the underlayer. The magnetic properties of the Co-Cr_15.5 film with an inclined orientation was estimated comparing measured hysteresis loops with simulated ones, which indicated to have inclined magnetic anisotropy with an anisotropy field of about 4.5kOe and a deflection angle of the anisotropy about the same as that of the crystalline orientation.},
keywords={},
doi={10.1587/transele.E96.C.1469},
ISSN={1745-1353},
month={December},}

Copy

TY - JOUR
TI - Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering
T2 - IEICE TRANSACTIONS on Electronics
SP - 1469
EP - 1473
AU - Naoki HONDA
AU - Akito HONDA
PY - 2013
DO - 10.1587/transele.E96.C.1469
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E96-C
IS - 12
JA - IEICE TRANSACTIONS on Electronics
Y1 - December 2013
AB - Deposition of inclined anisotropy film for bit-patterned media was studied using an oblique incidence collimated sputtering. Pt underlayer increased the inclination angle of magnetic layer more than 5° on a Ta seed layer. Further increase of the angle was obtained by annealing Pt/Ru underlayer resulting an inclination angle of 9.4° for a Co-Cr_15.5 film on the underlayer. The magnetic properties of the Co-Cr_15.5 film with an inclined orientation was estimated comparing measured hysteresis loops with simulated ones, which indicated to have inclined magnetic anisotropy with an anisotropy field of about 4.5kOe and a deflection angle of the anisotropy about the same as that of the crystalline orientation.
ER -