A Routing Method Using Directed Grid-Graph for Self-Aligned Quadruple Patterning

Takeshi IHARA; Toshiyuki HONGO; Atsushi TAKAHASHI; Chikaaki KODAMA

doi:10.1587/transfun.E100.A.1473

A Routing Method Using Directed Grid-Graph for Self-Aligned Quadruple Patterning

Takeshi IHARA, Toshiyuki HONGO, Atsushi TAKAHASHI, Chikaaki KODAMA

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Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14nm technology node. Although various routing algorithms for SAQP have been proposed, it is not easy to find a dense SAQP compliant routing pattern efficiently. Even though a grid for SAQP compliant routing pattern was proposed, it is not easy to find a valid routing pattern on the grid. The routing pattern of SAQP on the grid consists of three types of routing. Among them, third type has turn prohibition constraint on the grid. Typical routing algorithms often fail to find a valid routing for third type. In this paper, a simple directed grid-graph for third type is proposed. Valid SAQP compliant two dimensional routing patterns are found effectively by utilizing the proposed directed grid-graph. Experiments show that SAQP compliant routing patterns are found efficiently by our proposed method.

Publication: IEICE TRANSACTIONS on Fundamentals Vol.E100-A No.7 pp.1473-1480

Publication Date: 2017/07/01

Publicized

Online ISSN: 1745-1337

DOI: 10.1587/transfun.E100.A.1473

Type of Manuscript: Special Section PAPER (Special Section on Design Methodologies for System on a Chip)

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Authors

Takeshi IHARA
  Tokyo Institute of Technology
Toshiyuki HONGO
  Tokyo Institute of Technology
Atsushi TAKAHASHI
  Tokyo Institute of Technology
Chikaaki KODAMA
  Toshiba Corporation

Keyword

self-aligned quadruple patterning (SAQP), routing algorithm, turn prohibition constraint

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Takeshi IHARA, Toshiyuki HONGO, Atsushi TAKAHASHI, Chikaaki KODAMA, "A Routing Method Using Directed Grid-Graph for Self-Aligned Quadruple Patterning" in IEICE TRANSACTIONS on Fundamentals, vol. E100-A, no. 7, pp. 1473-1480, July 2017, doi: 10.1587/transfun.E100.A.1473.
Abstract: Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14nm technology node. Although various routing algorithms for SAQP have been proposed, it is not easy to find a dense SAQP compliant routing pattern efficiently. Even though a grid for SAQP compliant routing pattern was proposed, it is not easy to find a valid routing pattern on the grid. The routing pattern of SAQP on the grid consists of three types of routing. Among them, third type has turn prohibition constraint on the grid. Typical routing algorithms often fail to find a valid routing for third type. In this paper, a simple directed grid-graph for third type is proposed. Valid SAQP compliant two dimensional routing patterns are found effectively by utilizing the proposed directed grid-graph. Experiments show that SAQP compliant routing patterns are found efficiently by our proposed method.
URL: https://globals.ieice.org/en_transactions/fundamentals/10.1587/transfun.E100.A.1473/_p

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@ARTICLE{e100-a_7_1473,
author={Takeshi IHARA, Toshiyuki HONGO, Atsushi TAKAHASHI, Chikaaki KODAMA, },
journal={IEICE TRANSACTIONS on Fundamentals},
title={A Routing Method Using Directed Grid-Graph for Self-Aligned Quadruple Patterning},
year={2017},
volume={E100-A},
number={7},
pages={1473-1480},
abstract={Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14nm technology node. Although various routing algorithms for SAQP have been proposed, it is not easy to find a dense SAQP compliant routing pattern efficiently. Even though a grid for SAQP compliant routing pattern was proposed, it is not easy to find a valid routing pattern on the grid. The routing pattern of SAQP on the grid consists of three types of routing. Among them, third type has turn prohibition constraint on the grid. Typical routing algorithms often fail to find a valid routing for third type. In this paper, a simple directed grid-graph for third type is proposed. Valid SAQP compliant two dimensional routing patterns are found effectively by utilizing the proposed directed grid-graph. Experiments show that SAQP compliant routing patterns are found efficiently by our proposed method.},
keywords={},
doi={10.1587/transfun.E100.A.1473},
ISSN={1745-1337},
month={July},}

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TY - JOUR
TI - A Routing Method Using Directed Grid-Graph for Self-Aligned Quadruple Patterning
T2 - IEICE TRANSACTIONS on Fundamentals
SP - 1473
EP - 1480
AU - Takeshi IHARA
AU - Toshiyuki HONGO
AU - Atsushi TAKAHASHI
AU - Chikaaki KODAMA
PY - 2017
DO - 10.1587/transfun.E100.A.1473
JO - IEICE TRANSACTIONS on Fundamentals
SN - 1745-1337
VL - E100-A
IS - 7
JA - IEICE TRANSACTIONS on Fundamentals
Y1 - July 2017
AB - Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14nm technology node. Although various routing algorithms for SAQP have been proposed, it is not easy to find a dense SAQP compliant routing pattern efficiently. Even though a grid for SAQP compliant routing pattern was proposed, it is not easy to find a valid routing pattern on the grid. The routing pattern of SAQP on the grid consists of three types of routing. Among them, third type has turn prohibition constraint on the grid. Typical routing algorithms often fail to find a valid routing for third type. In this paper, a simple directed grid-graph for third type is proposed. Valid SAQP compliant two dimensional routing patterns are found effectively by utilizing the proposed directed grid-graph. Experiments show that SAQP compliant routing patterns are found efficiently by our proposed method.
ER -