Fabrication of SiN Films by Double Tubed Coaxial Line Type Microwave Plasma Chemical Vapor Deposition

Yukihiro KIYOTA; Kouji NUMADA; Isamu KATO

Copy

Yukihiro KIYOTA, Kouji NUMADA, Isamu KATO, "Fabrication of SiN Films by Double Tubed Coaxial Line Type Microwave Plasma Chemical Vapor Deposition" in IEICE TRANSACTIONS on transactions, vol. E70-E, no. 4, pp. 334-335, April 1987, doi: .
Abstract: We have fabricated SiN films with stoichiometric composition by double tubed coaxial line type microwave plasm chemical vapor deposition and have discussed the effects of the microwave power on the film qualities.
URL: https://globals.ieice.org/en_transactions/transactions/10.1587/e70-e_4_334/_p

Copy

@ARTICLE{e70-e_4_334,
author={Yukihiro KIYOTA, Kouji NUMADA, Isamu KATO, },
journal={IEICE TRANSACTIONS on transactions},
title={Fabrication of SiN Films by Double Tubed Coaxial Line Type Microwave Plasma Chemical Vapor Deposition},
year={1987},
volume={E70-E},
number={4},
pages={334-335},
abstract={We have fabricated SiN films with stoichiometric composition by double tubed coaxial line type microwave plasm chemical vapor deposition and have discussed the effects of the microwave power on the film qualities.},
keywords={},
doi={},
ISSN={},
month={April},}

Copy

TY - JOUR
TI - Fabrication of SiN Films by Double Tubed Coaxial Line Type Microwave Plasma Chemical Vapor Deposition
T2 - IEICE TRANSACTIONS on transactions
SP - 334
EP - 335
AU - Yukihiro KIYOTA
AU - Kouji NUMADA
AU - Isamu KATO
PY - 1987
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E70-E
IS - 4
JA - IEICE TRANSACTIONS on transactions
Y1 - April 1987
AB - We have fabricated SiN films with stoichiometric composition by double tubed coaxial line type microwave plasm chemical vapor deposition and have discussed the effects of the microwave power on the film qualities.
ER -