We have fabricated a multilayer structure for single flux quantum (SFQ) circuit application using a high-temperature superconductor (HTS). La0.2-Y0.9Ba1.9Cu3Ox (La-YBCO) base electrode layers were prepared by a dc or rf magnetron sputtering method. The reproducibility of film quality for dc-sputtered La-YBCO films was better than that for rf-sputtered films, and the dc sputtered films exhibited the average surface roughness Ra less than 1.0 nm and a Tc zero value of 88 K. By using the dc-sputtered La-YBCO films, a multilayer structure of SrSnO3/La-YBCO/SrSnO3/La-YBCO on MgO substrate with Ra below 2.0 nm was obtained. Interface-modified ramp-edge junctions with La0.2-Yb0.9Ba1.9Cu3Ox (La-YbBCO) counter electrodes have been fabricated by using this multilayer structure with dc-sputtered films. The fabricated junctions exhibited RSJ-type I-V characteristics with IcRn products of about 3 mV at 4.2 K. We also obtained a 1-σ Ic spread of 8% for a 1000-junction series-array. The sheet inductance values at 4.2 K for the base and counter electrodes on La-YBCO ground planes were 0.8 pH and 0.7 pH per square, respectively. Operation of several types of elementary SFQ circuits has been successfully demonstrated by using this multilayer structure.