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[Author] Weiwei SHAN(1hit)

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  • A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation

    Weiwei SHAN  Xin CHEN  

     
    BRIEF PAPER-Electronic Instrumentation and Control

      Vol:
    E94-C No:9
      Page(s):
    1486-1489

    In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.

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