A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation

Weiwei SHAN; Xin CHEN

doi:10.1587/transele.E94.C.1486

A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation

Weiwei SHAN, Xin CHEN

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In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.

Publication: IEICE TRANSACTIONS on Electronics Vol.E94-C No.9 pp.1486-1489

Publication Date: 2011/09/01

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Online ISSN: 1745-1353

DOI: 10.1587/transele.E94.C.1486

Type of Manuscript: BRIEF PAPER

Category: Electronic Instrumentation and Control

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Weiwei SHAN, Xin CHEN, "A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation" in IEICE TRANSACTIONS on Electronics, vol. E94-C, no. 9, pp. 1486-1489, September 2011, doi: 10.1587/transele.E94.C.1486.
Abstract: In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/transele.E94.C.1486/_p

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@ARTICLE{e94-c_9_1486,
author={Weiwei SHAN, Xin CHEN, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation},
year={2011},
volume={E94-C},
number={9},
pages={1486-1489},
abstract={In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.},
keywords={},
doi={10.1587/transele.E94.C.1486},
ISSN={1745-1353},
month={September},}

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TY - JOUR
TI - A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation
T2 - IEICE TRANSACTIONS on Electronics
SP - 1486
EP - 1489
AU - Weiwei SHAN
AU - Xin CHEN
PY - 2011
DO - 10.1587/transele.E94.C.1486
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E94-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2011
AB - In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.
ER -