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Masanori TAKAHASHI Yasuyoshi UCHIDA Shintaro YAMASAKI Junichi HASEGAWA Takeshi YAGI
For next generation planar lightwave circuit (PLC) devices, high function and high-density integration are required as well as downsizing and cost reduction. To realize these needs, high refractive index difference between a core and a clad $(Delta)$ is required. To use PLC for practical applications, silica-based PLC is one of the most attractive candidate. However, degradation of the optical properties and productivity occur when $Delta$ of the core becomes high. Thus, $Delta$ of most of the conventional PLC with GeO$_2$-SiO$_2$ core is designed less than 2.5%. In this paper, we report a silica-based ultra-high $Delta $ PLC with ZrO$_2$-SiO$_2$ core. 5.5%-$Delta$ ZrO$_2$-SiO$_2$ PLC has been realized with low propagation loss and basic characteristics has been confirmed. Potential of chip size reduction of the ZrO$_2$-SiO$_2$ PLC is shown.