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  • Characterization of the Laser-Recrystallized Single-Crystalline Si-SiO2 Interface

    Nobuo SASAKI  

     
    PAPER-SOI Wafers

      Vol:
    E75-C No:12
      Page(s):
    1430-1437

    The interface between laser-recrystallized Si and SiO2 is investigated by means of capacitance-voltage curve measurements. The recrystallization is performed by scanning cw Ar+ laser. The change in the C-V curves shows that the laser-recrystallization generates positive charge and the fast interface states at the Si-SiO2 interface, and creates n-type defects in recrystallized bulk silicon. Nominal interface charge increases linearly with a laser power. The increase in the charge is enhanced by fast laser-beam scanning velocity. The change in the C-V curve is suppressed, if a substrate is heated up to 450 during recrystallization. Complete recovery of the induced change in the C-V curves requires a subsequent furnace annealing at a temperature as high as 1100. These phenomena are explained by the generation of oxygen vacancy at the Si-SiO2 interface and quenched-in point defects in the recrystallized Si. The oxygen vacancy is produced by a reaction between the melted Si and SiO2. The quenched-in defects are produced during fast cooling of the melted Si.

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