We propose a nonlocal impact ionization model applicable for the drain region where electric field increases exponentially. It is expressed as a function of an electric field and a characteristic length which is determined by a thickness of gate oxide and a source/drain junction depth. An analytical substrate current model for n-MOSFET is also derived from the new nonlocal impact ionization model. The model well explains the reason why the theoretical characteristic length differs from empirical expressions used in a pseudo two-dimensional model for MOSFET's. The nonlocal impact ionization model implemented in a device simulator demonstrates that the new model can predict substrate current correctly in the framework of drift-diffusion model.