Fabrication Process of Nonarcing Power MEMS Switch

Yu YONEZAWA; Noboru WAKATSUKI; Yoshio SATOH; Tadashi NAKATANI; Koichiro SAWA

doi:10.1093/ietele/e88-c.8.1629

Fabrication Process of Nonarcing Power MEMS Switch

Yu YONEZAWA, Noboru WAKATSUKI, Yoshio SATOH, Tadashi NAKATANI, Koichiro SAWA

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We proposed a new electric contact device that suppresses the arc phenomena. The functions of electric contacts are divided into energizing and switching for arc suppression. Switching contacts consist of multielectrodes and each electrode current is suppressed by the series resistance. For realization of multicontacting, cantilever beam array electrodes were formed on a silicon substrate using micro-electromechanical systems (MEMS) technology. The finite element method was used to optimize the structure. The fabrication process of the cantilever was examined. Au-Au contact current of 0.97 A was broken without arc ignition.

Publication: IEICE TRANSACTIONS on Electronics Vol.E88-C No.8 pp.1629-1634

Publication Date: 2005/08/01

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DOI: 10.1093/ietele/e88-c.8.1629

Type of Manuscript: Special Section PAPER (Special Section on Recent Development of Electro-Mechanical Devices--Selected Papers from International Session on Electro-Mechanical Devices 2004 (IS-EMD2004)--)

Category: Relays and Switches

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Yu YONEZAWA, Noboru WAKATSUKI, Yoshio SATOH, Tadashi NAKATANI, Koichiro SAWA, "Fabrication Process of Nonarcing Power MEMS Switch" in IEICE TRANSACTIONS on Electronics, vol. E88-C, no. 8, pp. 1629-1634, August 2005, doi: 10.1093/ietele/e88-c.8.1629.
Abstract: We proposed a new electric contact device that suppresses the arc phenomena. The functions of electric contacts are divided into energizing and switching for arc suppression. Switching contacts consist of multielectrodes and each electrode current is suppressed by the series resistance. For realization of multicontacting, cantilever beam array electrodes were formed on a silicon substrate using micro-electromechanical systems (MEMS) technology. The finite element method was used to optimize the structure. The fabrication process of the cantilever was examined. Au-Au contact current of 0.97 A was broken without arc ignition.
URL: https://globals.ieice.org/en_transactions/electronics/10.1093/ietele/e88-c.8.1629/_p

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@ARTICLE{e88-c_8_1629,
author={Yu YONEZAWA, Noboru WAKATSUKI, Yoshio SATOH, Tadashi NAKATANI, Koichiro SAWA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Fabrication Process of Nonarcing Power MEMS Switch},
year={2005},
volume={E88-C},
number={8},
pages={1629-1634},
abstract={We proposed a new electric contact device that suppresses the arc phenomena. The functions of electric contacts are divided into energizing and switching for arc suppression. Switching contacts consist of multielectrodes and each electrode current is suppressed by the series resistance. For realization of multicontacting, cantilever beam array electrodes were formed on a silicon substrate using micro-electromechanical systems (MEMS) technology. The finite element method was used to optimize the structure. The fabrication process of the cantilever was examined. Au-Au contact current of 0.97 A was broken without arc ignition.},
keywords={},
doi={10.1093/ietele/e88-c.8.1629},
ISSN={},
month={August},}

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TY - JOUR
TI - Fabrication Process of Nonarcing Power MEMS Switch
T2 - IEICE TRANSACTIONS on Electronics
SP - 1629
EP - 1634
AU - Yu YONEZAWA
AU - Noboru WAKATSUKI
AU - Yoshio SATOH
AU - Tadashi NAKATANI
AU - Koichiro SAWA
PY - 2005
DO - 10.1093/ietele/e88-c.8.1629
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E88-C
IS - 8
JA - IEICE TRANSACTIONS on Electronics
Y1 - August 2005
AB - We proposed a new electric contact device that suppresses the arc phenomena. The functions of electric contacts are divided into energizing and switching for arc suppression. Switching contacts consist of multielectrodes and each electrode current is suppressed by the series resistance. For realization of multicontacting, cantilever beam array electrodes were formed on a silicon substrate using micro-electromechanical systems (MEMS) technology. The finite element method was used to optimize the structure. The fabrication process of the cantilever was examined. Au-Au contact current of 0.97 A was broken without arc ignition.
ER -