Two Dimensional Semiconductor-Based Photonic Crystal Slab Waveguides for Ultra-Fast Optical Signal Processing Devices

Yoshimasa SUGIMOTO; Yu TANAKA; Naoki IKEDA; Kyozo KANAMOTO; Yusui NAKAMURA; Shunsuke OHKOUCHI; Hitoshi NAKAMURA; Kuon INOUE; Hidekazu SASAKI; Yoshinori WATANABE; Koji ISHIDA; Hiroshi ISHIKAWA; Kiyoshi ASAKAWA

Two Dimensional Semiconductor-Based Photonic Crystal Slab Waveguides for Ultra-Fast Optical Signal Processing Devices

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We have fabricated several two-dimensional photonic-crystal (2DPC) slab waveguides by using fine electron beam lithography and dry etching. The 2DPC waveguides include straight, bend, Y-branch, directional coupler, and coupled-cavity waveguides on the GaAs/AlGaAs substrate as an application to the ultra-small and ultra-fast all-optical switching device. Transmission spectra and near field patterns were characterized in a wide wavelength range from 850 to 1600 nm with the sample finished to the air-bridge type 2DPC slab. These waveguides appear to be suitable for achieving the waveguide platform in the symmetrical-Mach-Zehnder device.

Publication: IEICE TRANSACTIONS on Electronics Vol.E87-C No.3 pp.316-327

Publication Date: 2004/03/01

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Type of Manuscript: Special Section INVITED PAPER (Special Section on Photonic Crystals and Their Device Applications)

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Yoshimasa SUGIMOTO, Yu TANAKA, Naoki IKEDA, Kyozo KANAMOTO, Yusui NAKAMURA, Shunsuke OHKOUCHI, Hitoshi NAKAMURA, Kuon INOUE, Hidekazu SASAKI, Yoshinori WATANABE, Koji ISHIDA, Hiroshi ISHIKAWA, Kiyoshi ASAKAWA, "Two Dimensional Semiconductor-Based Photonic Crystal Slab Waveguides for Ultra-Fast Optical Signal Processing Devices" in IEICE TRANSACTIONS on Electronics, vol. E87-C, no. 3, pp. 316-327, March 2004, doi: .
Abstract: We have fabricated several two-dimensional photonic-crystal (2DPC) slab waveguides by using fine electron beam lithography and dry etching. The 2DPC waveguides include straight, bend, Y-branch, directional coupler, and coupled-cavity waveguides on the GaAs/AlGaAs substrate as an application to the ultra-small and ultra-fast all-optical switching device. Transmission spectra and near field patterns were characterized in a wide wavelength range from 850 to 1600 nm with the sample finished to the air-bridge type 2DPC slab. These waveguides appear to be suitable for achieving the waveguide platform in the symmetrical-Mach-Zehnder device.
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/e87-c_3_316/_p

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@ARTICLE{e87-c_3_316,
author={Yoshimasa SUGIMOTO, Yu TANAKA, Naoki IKEDA, Kyozo KANAMOTO, Yusui NAKAMURA, Shunsuke OHKOUCHI, Hitoshi NAKAMURA, Kuon INOUE, Hidekazu SASAKI, Yoshinori WATANABE, Koji ISHIDA, Hiroshi ISHIKAWA, Kiyoshi ASAKAWA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Two Dimensional Semiconductor-Based Photonic Crystal Slab Waveguides for Ultra-Fast Optical Signal Processing Devices},
year={2004},
volume={E87-C},
number={3},
pages={316-327},
abstract={We have fabricated several two-dimensional photonic-crystal (2DPC) slab waveguides by using fine electron beam lithography and dry etching. The 2DPC waveguides include straight, bend, Y-branch, directional coupler, and coupled-cavity waveguides on the GaAs/AlGaAs substrate as an application to the ultra-small and ultra-fast all-optical switching device. Transmission spectra and near field patterns were characterized in a wide wavelength range from 850 to 1600 nm with the sample finished to the air-bridge type 2DPC slab. These waveguides appear to be suitable for achieving the waveguide platform in the symmetrical-Mach-Zehnder device.},
keywords={},
doi={},
ISSN={},
month={March},}

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TY - JOUR
TI - Two Dimensional Semiconductor-Based Photonic Crystal Slab Waveguides for Ultra-Fast Optical Signal Processing Devices
T2 - IEICE TRANSACTIONS on Electronics
SP - 316
EP - 327
AU - Yoshimasa SUGIMOTO
AU - Yu TANAKA
AU - Naoki IKEDA
AU - Kyozo KANAMOTO
AU - Yusui NAKAMURA
AU - Shunsuke OHKOUCHI
AU - Hitoshi NAKAMURA
AU - Kuon INOUE
AU - Hidekazu SASAKI
AU - Yoshinori WATANABE
AU - Koji ISHIDA
AU - Hiroshi ISHIKAWA
AU - Kiyoshi ASAKAWA
PY - 2004
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E87-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2004
AB - We have fabricated several two-dimensional photonic-crystal (2DPC) slab waveguides by using fine electron beam lithography and dry etching. The 2DPC waveguides include straight, bend, Y-branch, directional coupler, and coupled-cavity waveguides on the GaAs/AlGaAs substrate as an application to the ultra-small and ultra-fast all-optical switching device. Transmission spectra and near field patterns were characterized in a wide wavelength range from 850 to 1600 nm with the sample finished to the air-bridge type 2DPC slab. These waveguides appear to be suitable for achieving the waveguide platform in the symmetrical-Mach-Zehnder device.
ER -