Eigenmode Analysis of Propagation Constant for a Microstrip Line with Dummy Fills on a Si CMOS Substrate

Yuya ONO; Takuichi HIRANO; Kenichi OKADA; Jiro HIROKAWA; Makoto ANDO

doi:10.1587/transele.E94.C.1008

Eigenmode Analysis of Propagation Constant for a Microstrip Line with Dummy Fills on a Si CMOS Substrate

Yuya ONO, Takuichi HIRANO, Kenichi OKADA, Jiro HIROKAWA, Makoto ANDO

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In this paper we present eigenmode analysis of the propagation constant for a microstrip line with dummy fills on a Si CMOS substrate. The effect of dummy fills is not negligible, particularly in the millimeter-wave band, although it has been ignored below frequencies of a few GHz. The propagation constant of a microstrip line with a periodic structure on a Si CMOS substrate is analyzed by eigenmode analysis for one period of the line. The calculated propagation constant and characteristic impedance were compared with measured values for a chip fabricated by the 0.18 µm CMOS process. The agreement between the analysis and measurement was very good. The dependence of loss on the arrangement of dummy fills was also investigated by eigenmode analysis. It was found that the transmission loss becomes large when dummy fills are arranged at places where the electromagnetic field is strong.

Publication: IEICE TRANSACTIONS on Electronics Vol.E94-C No.6 pp.1008-1015

Publication Date: 2011/06/01

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Online ISSN: 1745-1353

DOI: 10.1587/transele.E94.C.1008

Type of Manuscript: Special Section PAPER (Special Section on Analog Circuits and Related SoC Integration Technologies)

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Yuya ONO, Takuichi HIRANO, Kenichi OKADA, Jiro HIROKAWA, Makoto ANDO, "Eigenmode Analysis of Propagation Constant for a Microstrip Line with Dummy Fills on a Si CMOS Substrate" in IEICE TRANSACTIONS on Electronics, vol. E94-C, no. 6, pp. 1008-1015, June 2011, doi: 10.1587/transele.E94.C.1008.
Abstract: In this paper we present eigenmode analysis of the propagation constant for a microstrip line with dummy fills on a Si CMOS substrate. The effect of dummy fills is not negligible, particularly in the millimeter-wave band, although it has been ignored below frequencies of a few GHz. The propagation constant of a microstrip line with a periodic structure on a Si CMOS substrate is analyzed by eigenmode analysis for one period of the line. The calculated propagation constant and characteristic impedance were compared with measured values for a chip fabricated by the 0.18 µm CMOS process. The agreement between the analysis and measurement was very good. The dependence of loss on the arrangement of dummy fills was also investigated by eigenmode analysis. It was found that the transmission loss becomes large when dummy fills are arranged at places where the electromagnetic field is strong.
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/transele.E94.C.1008/_p

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@ARTICLE{e94-c_6_1008,
author={Yuya ONO, Takuichi HIRANO, Kenichi OKADA, Jiro HIROKAWA, Makoto ANDO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Eigenmode Analysis of Propagation Constant for a Microstrip Line with Dummy Fills on a Si CMOS Substrate},
year={2011},
volume={E94-C},
number={6},
pages={1008-1015},
abstract={In this paper we present eigenmode analysis of the propagation constant for a microstrip line with dummy fills on a Si CMOS substrate. The effect of dummy fills is not negligible, particularly in the millimeter-wave band, although it has been ignored below frequencies of a few GHz. The propagation constant of a microstrip line with a periodic structure on a Si CMOS substrate is analyzed by eigenmode analysis for one period of the line. The calculated propagation constant and characteristic impedance were compared with measured values for a chip fabricated by the 0.18 µm CMOS process. The agreement between the analysis and measurement was very good. The dependence of loss on the arrangement of dummy fills was also investigated by eigenmode analysis. It was found that the transmission loss becomes large when dummy fills are arranged at places where the electromagnetic field is strong.},
keywords={},
doi={10.1587/transele.E94.C.1008},
ISSN={1745-1353},
month={June},}

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TY - JOUR
TI - Eigenmode Analysis of Propagation Constant for a Microstrip Line with Dummy Fills on a Si CMOS Substrate
T2 - IEICE TRANSACTIONS on Electronics
SP - 1008
EP - 1015
AU - Yuya ONO
AU - Takuichi HIRANO
AU - Kenichi OKADA
AU - Jiro HIROKAWA
AU - Makoto ANDO
PY - 2011
DO - 10.1587/transele.E94.C.1008
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E94-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 2011
AB - In this paper we present eigenmode analysis of the propagation constant for a microstrip line with dummy fills on a Si CMOS substrate. The effect of dummy fills is not negligible, particularly in the millimeter-wave band, although it has been ignored below frequencies of a few GHz. The propagation constant of a microstrip line with a periodic structure on a Si CMOS substrate is analyzed by eigenmode analysis for one period of the line. The calculated propagation constant and characteristic impedance were compared with measured values for a chip fabricated by the 0.18 µm CMOS process. The agreement between the analysis and measurement was very good. The dependence of loss on the arrangement of dummy fills was also investigated by eigenmode analysis. It was found that the transmission loss becomes large when dummy fills are arranged at places where the electromagnetic field is strong.
ER -