Evaluation of L-2L De-Embedding Method Considering Misalignment of Contact Position for Millimeter-Wave CMOS Circuit Design

Qinghong BU; Ning LI; Kenichi OKADA; Akira MATSUZAWA

doi:10.1587/transele.E95.C.942

Evaluation of L-2L De-Embedding Method Considering Misalignment of Contact Position for Millimeter-Wave CMOS Circuit Design

Qinghong BU, Ning LI, Kenichi OKADA, Akira MATSUZAWA

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This paper presents the evaluation of the L-2L de-embedding method with misalignment of the contact position. The issues of misalignment of the contact position are investigated. The analysis of misalignment in the L-2L de-embedding procedure is performed. Two comparisons are carried out to verify the error of the L-2L de-embedding method. The calculation percent error in quality factor of the transmission line becomes up to 9.0%, while the transistor S-parameter error percentage becomes up to 21% at 60 GHz in the experimental results. The results show that the measurement errors, caused by the misalignment of the contact position, should be considered carefully.

Publication: IEICE TRANSACTIONS on Electronics Vol.E95-C No.5 pp.942-948

Publication Date: 2012/05/01

Publicized

Online ISSN: 1745-1353

DOI: 10.1587/transele.E95.C.942

Type of Manuscript: PAPER

Category: Microwaves, Millimeter-Waves

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Qinghong BU, Ning LI, Kenichi OKADA, Akira MATSUZAWA, "Evaluation of L-2L De-Embedding Method Considering Misalignment of Contact Position for Millimeter-Wave CMOS Circuit Design" in IEICE TRANSACTIONS on Electronics, vol. E95-C, no. 5, pp. 942-948, May 2012, doi: 10.1587/transele.E95.C.942.
Abstract: This paper presents the evaluation of the L-2L de-embedding method with misalignment of the contact position. The issues of misalignment of the contact position are investigated. The analysis of misalignment in the L-2L de-embedding procedure is performed. Two comparisons are carried out to verify the error of the L-2L de-embedding method. The calculation percent error in quality factor of the transmission line becomes up to 9.0%, while the transistor S-parameter error percentage becomes up to 21% at 60 GHz in the experimental results. The results show that the measurement errors, caused by the misalignment of the contact position, should be considered carefully.
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/transele.E95.C.942/_p

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@ARTICLE{e95-c_5_942,
author={Qinghong BU, Ning LI, Kenichi OKADA, Akira MATSUZAWA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Evaluation of L-2L De-Embedding Method Considering Misalignment of Contact Position for Millimeter-Wave CMOS Circuit Design},
year={2012},
volume={E95-C},
number={5},
pages={942-948},
abstract={This paper presents the evaluation of the L-2L de-embedding method with misalignment of the contact position. The issues of misalignment of the contact position are investigated. The analysis of misalignment in the L-2L de-embedding procedure is performed. Two comparisons are carried out to verify the error of the L-2L de-embedding method. The calculation percent error in quality factor of the transmission line becomes up to 9.0%, while the transistor S-parameter error percentage becomes up to 21% at 60 GHz in the experimental results. The results show that the measurement errors, caused by the misalignment of the contact position, should be considered carefully.},
keywords={},
doi={10.1587/transele.E95.C.942},
ISSN={1745-1353},
month={May},}

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TY - JOUR
TI - Evaluation of L-2L De-Embedding Method Considering Misalignment of Contact Position for Millimeter-Wave CMOS Circuit Design
T2 - IEICE TRANSACTIONS on Electronics
SP - 942
EP - 948
AU - Qinghong BU
AU - Ning LI
AU - Kenichi OKADA
AU - Akira MATSUZAWA
PY - 2012
DO - 10.1587/transele.E95.C.942
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E95-C
IS - 5
JA - IEICE TRANSACTIONS on Electronics
Y1 - May 2012
AB - This paper presents the evaluation of the L-2L de-embedding method with misalignment of the contact position. The issues of misalignment of the contact position are investigated. The analysis of misalignment in the L-2L de-embedding procedure is performed. Two comparisons are carried out to verify the error of the L-2L de-embedding method. The calculation percent error in quality factor of the transmission line becomes up to 9.0%, while the transistor S-parameter error percentage becomes up to 21% at 60 GHz in the experimental results. The results show that the measurement errors, caused by the misalignment of the contact position, should be considered carefully.
ER -