Development of Array Detectors with Three-Dimensional Structure toward 1000 Pixels of Superconducting Tunnel Junctions

Go FUJII; Masahiro UKIBE; Shigetomo SHIKI; Masataka OHKUBO

doi:10.1587/transele.E98.C.192

Development of Array Detectors with Three-Dimensional Structure toward 1000 Pixels of Superconducting Tunnel Junctions

Go FUJII, Masahiro UKIBE, Shigetomo SHIKI, Masataka OHKUBO

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Superconducting tunnel junction (STJ) array detectors can exhibit excellent performance with respect to energy resolution, detection efficiency, and counting rate in the soft X-ray energy range, by which those excellent properties STJ array detectors are well suited for detecting X-rays at synchrotron radiation facilities. However, in order to achieve a high throughput analysis for trace impurity elements such as dopants in structural or functional materials, the sensitive area of STJ array detectors should be further enlarged up to more than 10 times larger by increasing the pixel number in array detectors. In this work, for a large STJ-pixel number of up to 1000 within a 10 mm- square compact chip, we have introduced three-dimensional (3D) structure by embedding a wiring layer in a SiO₂ isolation layer underneath a base electrode layer of STJs. The 3D structure is necessary for close-packed STJ arrangement, avoiding overlay of lead wiring, which is common in conventional two-dimensional layout. The fabricated STJ showed excellent current-voltage characteristics having low subgap currents less than 2 nA, which are the same as those of conventional STJs. An STJ pixel has an energy resolution of 31 eV (FWHM) for C-Kα (277 eV).

Publication: IEICE TRANSACTIONS on Electronics Vol.E98-C No.3 pp.192-195

Publication Date: 2015/03/01

Publicized

Online ISSN: 1745-1353

DOI: 10.1587/transele.E98.C.192

Type of Manuscript: BRIEF PAPER

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Authors

Go FUJII
  National Institute of Advanced Industrial Science and Technology (AIST)
Masahiro UKIBE
  National Institute of Advanced Industrial Science and Technology (AIST)
Shigetomo SHIKI
  National Institute of Advanced Industrial Science and Technology (AIST)
Masataka OHKUBO
  National Institute of Advanced Industrial Science and Technology (AIST)

Keyword

X-ray detector, Superconducting tunnel junction, Three-dimensional structure, X-ray absorption fine structure analysis, Soft X-ray

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Go FUJII, Masahiro UKIBE, Shigetomo SHIKI, Masataka OHKUBO, "Development of Array Detectors with Three-Dimensional Structure toward 1000 Pixels of Superconducting Tunnel Junctions" in IEICE TRANSACTIONS on Electronics, vol. E98-C, no. 3, pp. 192-195, March 2015, doi: 10.1587/transele.E98.C.192.
Abstract: Superconducting tunnel junction (STJ) array detectors can exhibit excellent performance with respect to energy resolution, detection efficiency, and counting rate in the soft X-ray energy range, by which those excellent properties STJ array detectors are well suited for detecting X-rays at synchrotron radiation facilities. However, in order to achieve a high throughput analysis for trace impurity elements such as dopants in structural or functional materials, the sensitive area of STJ array detectors should be further enlarged up to more than 10 times larger by increasing the pixel number in array detectors. In this work, for a large STJ-pixel number of up to 1000 within a 10 mm- square compact chip, we have introduced three-dimensional (3D) structure by embedding a wiring layer in a SiO₂ isolation layer underneath a base electrode layer of STJs. The 3D structure is necessary for close-packed STJ arrangement, avoiding overlay of lead wiring, which is common in conventional two-dimensional layout. The fabricated STJ showed excellent current-voltage characteristics having low subgap currents less than 2 nA, which are the same as those of conventional STJs. An STJ pixel has an energy resolution of 31 eV (FWHM) for C-Kα (277 eV).
URL: https://globals.ieice.org/en_transactions/electronics/10.1587/transele.E98.C.192/_p

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@ARTICLE{e98-c_3_192,
author={Go FUJII, Masahiro UKIBE, Shigetomo SHIKI, Masataka OHKUBO, },
journal={IEICE TRANSACTIONS on Electronics},
title={Development of Array Detectors with Three-Dimensional Structure toward 1000 Pixels of Superconducting Tunnel Junctions},
year={2015},
volume={E98-C},
number={3},
pages={192-195},
abstract={Superconducting tunnel junction (STJ) array detectors can exhibit excellent performance with respect to energy resolution, detection efficiency, and counting rate in the soft X-ray energy range, by which those excellent properties STJ array detectors are well suited for detecting X-rays at synchrotron radiation facilities. However, in order to achieve a high throughput analysis for trace impurity elements such as dopants in structural or functional materials, the sensitive area of STJ array detectors should be further enlarged up to more than 10 times larger by increasing the pixel number in array detectors. In this work, for a large STJ-pixel number of up to 1000 within a 10 mm- square compact chip, we have introduced three-dimensional (3D) structure by embedding a wiring layer in a SiO₂ isolation layer underneath a base electrode layer of STJs. The 3D structure is necessary for close-packed STJ arrangement, avoiding overlay of lead wiring, which is common in conventional two-dimensional layout. The fabricated STJ showed excellent current-voltage characteristics having low subgap currents less than 2 nA, which are the same as those of conventional STJs. An STJ pixel has an energy resolution of 31 eV (FWHM) for C-Kα (277 eV).},
keywords={},
doi={10.1587/transele.E98.C.192},
ISSN={1745-1353},
month={March},}

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TY - JOUR
TI - Development of Array Detectors with Three-Dimensional Structure toward 1000 Pixels of Superconducting Tunnel Junctions
T2 - IEICE TRANSACTIONS on Electronics
SP - 192
EP - 195
AU - Go FUJII
AU - Masahiro UKIBE
AU - Shigetomo SHIKI
AU - Masataka OHKUBO
PY - 2015
DO - 10.1587/transele.E98.C.192
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E98-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2015
AB - Superconducting tunnel junction (STJ) array detectors can exhibit excellent performance with respect to energy resolution, detection efficiency, and counting rate in the soft X-ray energy range, by which those excellent properties STJ array detectors are well suited for detecting X-rays at synchrotron radiation facilities. However, in order to achieve a high throughput analysis for trace impurity elements such as dopants in structural or functional materials, the sensitive area of STJ array detectors should be further enlarged up to more than 10 times larger by increasing the pixel number in array detectors. In this work, for a large STJ-pixel number of up to 1000 within a 10 mm- square compact chip, we have introduced three-dimensional (3D) structure by embedding a wiring layer in a SiO₂ isolation layer underneath a base electrode layer of STJs. The 3D structure is necessary for close-packed STJ arrangement, avoiding overlay of lead wiring, which is common in conventional two-dimensional layout. The fabricated STJ showed excellent current-voltage characteristics having low subgap currents less than 2 nA, which are the same as those of conventional STJs. An STJ pixel has an energy resolution of 31 eV (FWHM) for C-Kα (277 eV).
ER -