An AES Study on the Anodization of Al/Mo/Al Multilayer Films

Atsushi NOYA; Katsutaka SASAKI; Toshiji UMEZAWA; Tsuyoshi DOBASHI

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Atsushi NOYA, Katsutaka SASAKI, Toshiji UMEZAWA, Tsuyoshi DOBASHI, "An AES Study on the Anodization of Al/Mo/Al Multilayer Films" in IEICE TRANSACTIONS on transactions, vol. E71-E, no. 4, pp. 266-267, April 1988, doi: .
Abstract: Anodization behavior of Al/Mo/Al multilayer films is studied by the method of depth profiling with Auger electron spectroscopy. The leaving out of the molybdenum layer by the drastic transport is observed. The results are discussed on the basis of the mobility of molybdenum cations.
URL: https://globals.ieice.org/en_transactions/transactions/10.1587/e71-e_4_266/_p

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@ARTICLE{e71-e_4_266,
author={Atsushi NOYA, Katsutaka SASAKI, Toshiji UMEZAWA, Tsuyoshi DOBASHI, },
journal={IEICE TRANSACTIONS on transactions},
title={An AES Study on the Anodization of Al/Mo/Al Multilayer Films},
year={1988},
volume={E71-E},
number={4},
pages={266-267},
abstract={Anodization behavior of Al/Mo/Al multilayer films is studied by the method of depth profiling with Auger electron spectroscopy. The leaving out of the molybdenum layer by the drastic transport is observed. The results are discussed on the basis of the mobility of molybdenum cations.},
keywords={},
doi={},
ISSN={},
month={April},}

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TY - JOUR
TI - An AES Study on the Anodization of Al/Mo/Al Multilayer Films
T2 - IEICE TRANSACTIONS on transactions
SP - 266
EP - 267
AU - Atsushi NOYA
AU - Katsutaka SASAKI
AU - Toshiji UMEZAWA
AU - Tsuyoshi DOBASHI
PY - 1988
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E71-E
IS - 4
JA - IEICE TRANSACTIONS on transactions
Y1 - April 1988
AB - Anodization behavior of Al/Mo/Al multilayer films is studied by the method of depth profiling with Auger electron spectroscopy. The leaving out of the molybdenum layer by the drastic transport is observed. The results are discussed on the basis of the mobility of molybdenum cations.
ER -