Fabrication of Electroluminescent ZnS: TbF<SUB><I>x</I></SUB> Films by RF Sputtering from a Ceramic Target

Katsuhiko TANAKA; Masato KOBAYASHI; Yasuhiro NEGORO; Tohru KASANAMI

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Katsuhiko TANAKA, Masato KOBAYASHI, Yasuhiro NEGORO, Tohru KASANAMI, "Fabrication of Electroluminescent ZnS: TbFx Films by RF Sputtering from a Ceramic Target" in IEICE TRANSACTIONS on transactions, vol. E71-E, no. 6, pp. 559-561, June 1988, doi: .
Abstract: This paper presents advantages of sputtering technique using a ceramic target instead of a conventional powder target for preparing ZnS: TbF_x emitting layer in electroluminescent devices.
URL: https://globals.ieice.org/en_transactions/transactions/10.1587/e71-e_6_559/_p

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@ARTICLE{e71-e_6_559,
author={Katsuhiko TANAKA, Masato KOBAYASHI, Yasuhiro NEGORO, Tohru KASANAMI, },
journal={IEICE TRANSACTIONS on transactions},
title={Fabrication of Electroluminescent ZnS: TbFx Films by RF Sputtering from a Ceramic Target},
year={1988},
volume={E71-E},
number={6},
pages={559-561},
abstract={This paper presents advantages of sputtering technique using a ceramic target instead of a conventional powder target for preparing ZnS: TbF_x emitting layer in electroluminescent devices.},
keywords={},
doi={},
ISSN={},
month={June},}

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TY - JOUR
TI - Fabrication of Electroluminescent ZnS: TbFx Films by RF Sputtering from a Ceramic Target
T2 - IEICE TRANSACTIONS on transactions
SP - 559
EP - 561
AU - Katsuhiko TANAKA
AU - Masato KOBAYASHI
AU - Yasuhiro NEGORO
AU - Tohru KASANAMI
PY - 1988
DO -
JO - IEICE TRANSACTIONS on transactions
SN -
VL - E71-E
IS - 6
JA - IEICE TRANSACTIONS on transactions
Y1 - June 1988
AB - This paper presents advantages of sputtering technique using a ceramic target instead of a conventional powder target for preparing ZnS: TbF_x emitting layer in electroluminescent devices.
ER -