A 0.96µm2 NAND-structured stacked capacitor cell has been achieved using conventional i-line photolithography and a 0.4µm design rule. Memory cell patterns for critical levels have been designed with a simple lineand-space configuration and a completely repeated hole arrangement for large lithography process margin. The word-line pitch and bit-line pitch are 0.9µm and0.95µm, respectively. In order to obtain sufficient storage capacitance and large alignment margin, a self-aligned cylindrical stacked capacitor and bit line plug fabrication process has been developed. These new technologies have enabled storage capacitance of 15 fF/cell with a 0.5µm capacitor height and a 5 nm equivalent SiO2 film thickness for nitride-top oxide(NO) film in the bit-line over capacitor(BOC) structure. Due to its lithography-oriented cell design and self-aligned process procedure, the present cell is a promising candidate for 256 Mb DRAM and beyond.

This paper proposes a small 1/4Vcc bit-line swing scheme and a related sense amplifier scheme for low power 1 V operating DRAM. Using the proposed small bit-line swing scheme, the stress bias of memory cell transistor and capacitor is reduced to half that of the conventional DRAM, resulting in improvement of device reliability. The proposed sense amplifier scheme achieves high speed and stable sensing/restoring operation at 250mV bit-line swing, which is much smaller than threshold voltage. The proposed scheme reduces the total power dissipation of bit-line sensing/restoring operation to 40% of the conventional one. This paper also proposes a small 4F2 size memory cell and a new twisted bit-line scheme. The array noise is reduced to 8.6% of the conventional DRAM.