We have developed InGaP-channel field effect transistors (FETs) with high breakdown voltages that can be fabricated by using conventional GaAs FET fabrication processes. The buffer and barrier layers were also optimized for the realization of high-voltage operation. The InGaP-channel FET has an extremely high on-state drain-to-source breakdown voltage of over 40 V, and a gate-to-drain breakdown voltage of 55 V. This enabled high-voltage large-signal operation at 40 V. The third-order intermodulation distortion of the InGaP channel FETs was 10-20 dB lower than that of an equivalent GaAs-channel FET, due to the high operating voltage.

The subject of this study is to propose a new structure that can realize simultaneously high breakdown voltage and high packing density for both Nch low side switch and Pch high side switch in 200 V class rating. As the conventional techniques for the electric field relaxation, the structure of field plate, field ring and RESURF are well known, but these techniques are inadequate for the high packing density because they are the techniques in surface region. In order to conquer this subject, it is necessary to relax the electric field in the deep region. The electric field relaxation was investigated by device simulation. In the Nch low side switch the electric field is relaxed by buried oxide film in SOI structure. However, electric field relaxation cannot be realized only by adapting the SOI structure for Pch high side switch. Then we tried to insert an intrinsic layer between P-drift layer and the buried oxide film in order to spread the depletion layer in the deep region. This spread depletion layer by intrinsic layer and the depletion layer by field plate connect vertically, and the dosage of the ion implantation for drift layer can be set to two times higher than the case without intrinsic layer. As the results, it was revealed that the SOI structure with intrinsic layer is effective to achieve this subject. Furthermore, by fabricating both Nch low side switch and Pch high side switch on intrinsic SOI substrate, breakdown voltage more than 250 V were achieved.

A buried gate AlGaAs/InGaAs heterojunction FET (HJFET) with gate breakdown voltage of 30 V was examined for high drain bias (higher than 10 V) operation. High breakdown voltage was realized due to the optimization of the narrow recess depth. A 1.4 mm HJFET has exhibited an output power of 30.2 dBm (1050 mW) with 50% power added efficiency (PAE) and 12.1 dB linear gain at 12 GHz with a 13 V drain bias. An internal matching circuit for a 16.8 mm HJFET was designed using a large-signal load impedance determined from load-pull measurement. The 16.8 mm internally-matched HJFET has delivered 38.9 dBm (7.8 W) output power with 46% PAE and 11.6 dB linear gain at 12 GHz with a drain bias of 13 V. This is the first report of higher than 10 V operation of an X- and Ku-band power HJFET with the excellent power performance.