A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.

This paper presents a framework for reducing the energy consumption of embedded real-time systems. We implemented the presented framework as both an optimization toolchain and an energy-aware real-time operating system. The framework consists of the integration of multiple techniques to optimize the energy consumption. The main idea behind our approach is to utilize trade-offs between the energy consumption and the performance of different processor configurations during task checkpoints, and to maintain memory allocation during task context switches. In our framework, a target application is statically analyzed at both intra-task and inter-task levels. Based on these analyzed results, runtime optimization is performed in response to the behavior of the application. A case study shows that our toolchain and real-time operating systems have achieved energy reduction while satisfying the real-time performance. The toolchain has also been successfully applied to a practical application.

A two-dimensional laser beam profiler has been developed that can measure the intensity distribution on a sample surface of a single-shot of an excimer-laser light beam from not only the macroscopic viewpoint, but also the microscopic viewpoint, which is important to excimer-laser triggered lateral large-grain growth of Si. A resolution as fine as 0.4 µm was obtained with a field of view of as large as 30 µm 30 µm. The effects of homogenizers, phase-shifters, and their combination on beam profiles were quantitatively investigated by using this apparatus. The relationship between the microscopic beam profile and the surface morphology of laterally grown grains was also examined.