Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer

Minoru SASAKI; Masahiro ISHIMORI; JongHyeong SONG; Kazuhiro HANE

doi:10.1093/ietele/e90-c.1.147

Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer

Minoru SASAKI, Masahiro ISHIMORI, JongHyeong SONG, Kazuhiro HANE

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Summary :

An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.

Publication: IEICE TRANSACTIONS on Electronics Vol.E90-C No.1 pp.147-148

Publication Date: 2007/01/01

Publicized

Online ISSN: 1745-1353

DOI: 10.1093/ietele/e90-c.1.147

Type of Manuscript: Special Section LETTER (Special Section on Microoptomechatronics)

Category: Micro/Nano Photonic Devices

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Minoru SASAKI, Masahiro ISHIMORI, JongHyeong SONG, Kazuhiro HANE, "Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer" in IEICE TRANSACTIONS on Electronics, vol. E90-C, no. 1, pp. 147-148, January 2007, doi: 10.1093/ietele/e90-c.1.147.
Abstract: An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.
URL: https://globals.ieice.org/en_transactions/electronics/10.1093/ietele/e90-c.1.147/_p

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@ARTICLE{e90-c_1_147,
author={Minoru SASAKI, Masahiro ISHIMORI, JongHyeong SONG, Kazuhiro HANE, },
journal={IEICE TRANSACTIONS on Electronics},
title={Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer},
year={2007},
volume={E90-C},
number={1},
pages={147-148},
abstract={An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.},
keywords={},
doi={10.1093/ietele/e90-c.1.147},
ISSN={1745-1353},
month={January},}

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TY - JOUR
TI - Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer
T2 - IEICE TRANSACTIONS on Electronics
SP - 147
EP - 148
AU - Minoru SASAKI
AU - Masahiro ISHIMORI
AU - JongHyeong SONG
AU - Kazuhiro HANE
PY - 2007
DO - 10.1093/ietele/e90-c.1.147
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E90-C
IS - 1
JA - IEICE TRANSACTIONS on Electronics
Y1 - January 2007
AB - An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.
ER -