A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.

Photonic crystal waveguide switches with movable micro-electro-mechanical actuators are proposed and fabricated by silicon micromachining. The switch structure consists of in-line input and output photonic crystal waveguide slabs, and a switching slab to bridge the gap between the waveguides. By driving the switching slab with a micro electro-mechanical actuator, the transmission between the waveguides is modulated. For driving the slabs, two kinds of actuator, i.e., vertical and parallel motion actuators are proposed for the respective switches. The switching characteristics are also investigated by calculations using the finite-difference time-domain method.

Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micro-machining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.