Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser

Masahiro ISHIMORI; Minoru SASAKI; Kazuhiro HANE

doi:10.1093/ietele/e90-c.1.72

Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser

Masahiro ISHIMORI, Minoru SASAKI, Kazuhiro HANE

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A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

Publication: IEICE TRANSACTIONS on Electronics Vol.E90-C No.1 pp.72-77

Publication Date: 2007/01/01

Publicized

Online ISSN: 1745-1353

DOI: 10.1093/ietele/e90-c.1.72

Type of Manuscript: Special Section PAPER (Special Section on Microoptomechatronics)

Category: Micro/Nano Photonic Devices

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Masahiro ISHIMORI, Minoru SASAKI, Kazuhiro HANE, "Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser" in IEICE TRANSACTIONS on Electronics, vol. E90-C, no. 1, pp. 72-77, January 2007, doi: 10.1093/ietele/e90-c.1.72.
Abstract: A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.
URL: https://globals.ieice.org/en_transactions/electronics/10.1093/ietele/e90-c.1.72/_p

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@ARTICLE{e90-c_1_72,
author={Masahiro ISHIMORI, Minoru SASAKI, Kazuhiro HANE, },
journal={IEICE TRANSACTIONS on Electronics},
title={Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser},
year={2007},
volume={E90-C},
number={1},
pages={72-77},
abstract={A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.},
keywords={},
doi={10.1093/ietele/e90-c.1.72},
ISSN={1745-1353},
month={January},}

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TY - JOUR
TI - Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser
T2 - IEICE TRANSACTIONS on Electronics
SP - 72
EP - 77
AU - Masahiro ISHIMORI
AU - Minoru SASAKI
AU - Kazuhiro HANE
PY - 2007
DO - 10.1093/ietele/e90-c.1.72
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E90-C
IS - 1
JA - IEICE TRANSACTIONS on Electronics
Y1 - January 2007
AB - A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.
ER -