A New Method to Extract MOSFET Threshold Voltage, Effective Channel Length, and Channel Mobility Using S-parameter Measurement

Han-Yu CHEN, Kun-Ming CHEN, Guo-Wei HUANG, Chun-Yen CHANG, Tiao-Yuan HUANG

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Summary :

In this work, a simple method for extracting MOSFET threshold voltage, effective channel length and channel mobility by using S-parameter measurement is presented. In the new method, the dependence between the channel conductivity and applied gate voltage of the MOSFET device is cleverly utilized to extract the threshold voltage, while biasing the drain node of the device at zero voltage during measurement. Moreover, the effective channel length and channel mobility can also be obtained with the same measurement. Furthermore, all the physical parameters can be extracted directly on the modeling devices without relying on specifically designed test devices. Most important of all, only one S-parameter measurement is required for each device under test (DUT), making the proposed extraction method promising for automatic measurement applications.

Publication
IEICE TRANSACTIONS on Electronics Vol.E87-C No.5 pp.726-732
Publication Date
2004/05/01
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Section on Advances in Characterization and Measurement Technologies for Microwave and Millimeter-Wave Materials, Devices and Circuits)
Category
Active Devices and Circuits

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