A Novel Threshold Voltage Distribution Measuring Technique for Flash EEPROM Devices

Toshihiko HIMENO, Naohiro MATSUKAWA, Hiroaki HAZAMA, Koji SAKUI, Masamitsu OSHIKIRI, Kazunori MASUDA, Kazushige KANDA, Yasuo ITOH, Jin-ichi, MIYAMOTO

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Summary :

A new, simple test circuit for measuring the threshold voltage distribution of flash EEPROM cell transistors is described. This circuit makes it possible to perform a reliability test for a large number of memory cell transistors with easy static operation because it reduces the measuring time drastically. In addition, this circuit can measure the highest and lowest thresh-old voltages of memory cell transistors easily. This method is suitable for performing the reliability test, such as program/erase endurance test and data retention test, for a large number of flash memory cell transistors. The usefulness of this new test circuit has been confirmed by applying it to 64 Kbit NAND-type flash memory cell array.

Publication
IEICE TRANSACTIONS on Electronics Vol.E79-C No.2 pp.145-151
Publication Date
1996/02/25
Publicized
Online ISSN
DOI
Type of Manuscript
Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category
Device and Circuit Characterization

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