In this research, we investigated the digital/analog-operation utilizing ferroelectric nondoped HfO2 (FeND-HfO2) as a blocking layer (BL) in the Hf-based metal/oxide/nitride/oxide/Si (MONOS) nonvolatile memory (NVM), so called FeNOS NVM. The Al/HfN0.5/HfN1.1/HfO2/p-Si(100) FeNOS diodes realized small equivalent oxide thickness (EOT) of 4.5 nm with the density of interface states (Dit) of 5.3 × 1010 eV-1cm-2 which were suitable for high-speed and low-voltage operation. The flat-band voltage (VFB) was well controlled as 80-100 mV with the input pulses of ±3 V/100 ms controlled by the partial polarization of FeND-HfO2 BL at each 2-bit state operated by the charge injection with the input pulses of +8 V/1-100 ms.

Edge computing, which has been gaining attention in recent years, has many advantages, such as reducing the load on the cloud, not being affected by the communication environment, and providing excellent security. Therefore, many researchers have attempted to implement neural networks, which are representative of machine learning in edge computing. Neural networks can be divided into inference and learning parts; however, there has been little research on implementing the learning component in edge computing in contrast to the inference part. This is because learning requires more memory and computation than inference, easily exceeding the limit of resources available for edge computing. To overcome this problem, this research focuses on the optimizer, which is the heart of learning. In this paper, we introduce our new optimizer, hardware-oriented logarithmic momentum estimation (Holmes), which incorporates new perspectives not found in existing optimizers in terms of characteristics and strengths of hardware. The performance of Holmes was evaluated by comparing it with other optimizers with respect to learning progress and convergence speed. Important aspects of hardware implementation, such as memory and operation requirements are also discussed. The results show that Holmes is a good match for edge computing with relatively low resource requirements and fast learning convergence. Holmes will help create an era in which advanced machine learning can be realized on edge computing.

Ferroelectric gate field-effect transistors (MFSFETs) were investigated utilizing nondoped HfO2 deposited by RF magnetron sputtering utilizing Hf target. After the post-metallization annealing (PMA) process with Pt top gate at 500°C/30s, ferroelectric characteristic of 10nm thick nondoped HfO2 was obtained. The fabricated MFSFETs showed the memory window of 1.7V when the voltage sweep range was from -3 to 3V.

A 1-Transistor 4-Magnetic Tunnel Junction (1T-4MTJ) memory cell has been proposed for field type of Magnetic Random Access Memory (MRAM). Proposed 1T-4MTJ memory cell array is achieved 44% higher density than that of conventional 1T-1MTJ thanks to the common access transistor structure in a 4-bit memory cell. A self-reference sensing scheme which can read out with write-back in four clock cycles has been also proposed. Furthermore, we add to estimate with considering sense amplifier variation and show 1T-4MTJ cell configuration is the best solution in IoT applications. A 1-Mbit MRAM test chip is designed and fabricated successfully using 130-nm CMOS process. By applying 1T-4MTJ high density cell and partially embedded wordline driver peripheral into the cell array, the 1-Mbit macro size is 4.04 mm2 which is 35.7% smaller than the conventional one. Measured data shows that the read access is 55 ns at 1.5 V typical supply voltage and 25C. Combining with conventional high-speed 1T-1MTJ caches and proposed high-density 1T-4MTJ user memories is an effective on-chip hierarchical non-volatile memory solution, being implemented for low-power MCUs and SoCs of IoT applications.

A modified modeling of residue effect on nano-electro-mechanical nonvolatile memory (NEMory) is presented for considering wet etching process. The effect of a residue under the cantilever is investigated for the optimization. The feasibility of the proposed model is investigated by finite element analysis simulations.

New concept of CMOS nonvolatile memory is presented with demonstration of cell implementations. The memory cell, which is a comparator basically, makes use of comparator offset for storage quantity and the FN stress phenomena for cell programming. We also propose the stress-packet operation which is the relevant programming method to finely control the offset of the memory cell. The memory cell is multiple-time programmable while it is implemented in a standard CMOS process. We fabricated the memory cell arrays of the latch comparator and demonstrated that it is rewritten several times. We also investigated the reliability of cell data retention by monitoring programmed offsets for several months.

In this paper, a 60 nm-thick ferroelectric film of poly(vinylidene fluoride–trifluoroethylene) on a flexible substrate of aluminum foil was fabricated and characterized. Compared to pristine silicon wafer, Al-foil has very large root-mean-square (RMS) roughness, thus presenting challenges for the fabrication of flat and uniform electronic devices on such a rough substrate. In particular, RMS roughness affects the leakage current of dielectrics, the uniformity of devices, and the switching time in ferroelectrics. To avoid these kinds of problems, a new thin film fabrication method adopting a detach-and-transfer technique has been developed. Here, 'detach' means that the ferroelectric film is detached from a flat substrate (sacrificial substrate), and 'transfer' refers to the process of the detached film being moved onto the rough substrate (main substrate). To characterize the dielectric property of the transferred film, polarization and voltage relationships were measured, and the results showed that a hysteresis loop could be obtained with low leakage current.

This paper presents a content-addressable memory (CAM) using a phase-change device. A hierarchical match-line structure and a one-hot-spot block code are indispensable to suppress the resistance ratio of the phase-change device and the area overhead of match detectors. As a result, an 8-nsec 72-bit-parallel-search CAM is implemented using a phase-change-device/MOS-hybrid circuitry, where high and low resistances are higher than 2.3 MΩ and lower than 97 kΩ, respectively, while maintaining one-day retention.

A HfO2 as the charge-storage layer with the physical thickness thinner than 4 nm in silicon-oxide-high-k oxide-oxide-silicon (SOHOS) flash memory was investigated. Compared to the conventional silicon-oxide-nitride-oxide-silicon (SONOS) flash memory, the SOHOS shows the slow operational speed and exhibits the poorer retention characteristics. These are attributed to the thin physical thickness below 4 nm and the crystallization of the HfO2 to contribute the lateral migration of the trapped charge in the trapping layer during high temperature annealing process.

MOS capacitors with Si-implanted thermal oxide and CVD deposited oxide of 30 nm thickness were fabricated for applications of non-volatile memory and electroluminescence devices. Current-voltage (I-V) and I-V hysteresis characteristics were measured, and the hysteresis window (HW) and the integrated charge of HW (ICHW) extracted from the hysteresis data were discussed. The HW characteristics of high Si dose samples showed the asymmetrical double-peaks curves with the hump in both tails. The ICHW almost converged after the 4th cycle and had the voltage sweep speed dependence. All +ICHW and -ICHW characteristics were closely related to the static (+I)-(+VG) and (-I)-(-VG) curves, respectively. For the high Si dose samples, the clear hump currents in the static I-VG characteristics contribute to lower the rising voltage and to steepen the ICHW increase, which correspond to the large stored charge in the oxide.

Recently, various types of 3-D nonvolatile memory (NVM) devices have been researched to improve the integration density [1]-[3]. The NVM device of pillar structure can be considered as one of the candidates [4],[5]. When this is applied to a NAND flash memory array, bottom end of the device channel is connected to the bulk silicon. In this case, the current in vertical direction varies depending on the thickness of silicon channel. When the channel is thick, the difference of saturation current levels between on/off states of individual device is more obvious. On the other hand, when the channel is thin, the on/off current increases simultaneously whereas the saturation currents do not differ very much. The reason is that the channel potential barrier seen by drain electrons is lowered by read voltage on the opposite sidewall control gate. This phenomenon that can occur in 3-D structure devices due to proximity can be called gate-induced barrier lowering (GIBL). In this work, the dependence of GIBL on silicon channel thickness is investigated, which will be the criteria in the implementation of reliable ultra-small NVM devices.

A 2-bit operational metal/silicon-oxide-nitride-oxide-silicon (MONOS/SONOS) nonvolatile memory using an asymmetric double-gate (ASDG) MOSFET was studied to double flash memory density. The 2-bit programming and erasing was performed by Fowler-Nordheim (FN) tunneling in a NAND array architecture using individually controlled gates. A threshold voltage shift of programmed states for the 2-bit operation was investigated with the aid of a SILVACO® simulator in both sides of the gate by changing gate workfunctions and tunneling oxide thicknesses. In this paper, the scalability of the device down to 30 nm was demonstrated by numerical simulation. Additionally, guidelines of the 2-bit ASDG nonvolatile memory (NVM) structure and operational conditions were proposed for "program," "read," and "erase."

A radio frequency identification tag LSI operating with the carrier frequency of 13.56 MHz as well as storing nonvolatile information in embedded ferroelectric random access memory (FeRAM) has been developed. A full wave rectifier composed of PMOS transistor diodes and NMOS transistor switches achieves RF-to-DC power conversion efficiency over 54%. The entire 16 kbits write and read transaction time can be reduced to 2.1 sec by the use of FeRAM, which corresponds to 2.2 times speed enhancement over conventional EEPROM based tag LSIs. The communication range of the FeRAM based tag LSI can be effectively improved by storing antitheft information in a ferroelectric nonvolatile flip-flop, which can reduce the power consumption of FeRAM from 27 µW to 5 µW. The communication range for the antitheft gate system becomes 70 cm.

Circuit techniques to realize stable recall operation and virtually unlimited read/program cycle operations in ferroelectric memory based nonvolatile (NV) SRAM composed of six-transistor and four-ferroelectric capacitor cells have been developed. Unlimited program cycle operation independent of ferroelectric material characteristics is realized by proper control of plate lines. Reliability evaluation results show that the developed memory cell has sufficient operation margin after stresses of temperature, fatigue, DC bias. Application of NV-SRAM to programmable logic devices has been discussed with a prototype of dynamically programmable gate arrays.

This paper describes a 0.13 µm CMOS Logic process compatible single poly gate type non-volatile (NV) memory with a differential cell architecture, which is tailored for a rewritable FUSE (CMOS-FUSE) for System-on-a Chip (SoC). This paper features the following points; 1) firstly quantified how much important is avoiding any additional process cost and area penalty rather than reducing the area of memory cell itself from the chip cost point of view for the new SoC applications. CMOS FUSE can provide cost-competitive than the high-density NV memories (50-fold higher density with 20% additional cost relative to CMOS FUSE) in the capacity range of 200 kbit for the SoC occupied the logic area of 40 mm2. 2) firstly discussed in detail how much the differential cell architecture can change a data retention characteristics including an activation energy (Ea), failure-rate, and tail-bits issues relative to the conventional one based on the measured data of 0.13 µm devices. Based on the measured data retention characteristics at 300, 250, and 200, it is found that the proposed differential approach makes it possible to increase Ea by 1.5 times (from 1.52 eV to 2.23 eV), which means it can be expected to realize a 20000-fold longer data retention characteristics at 105. Even if considering the tail-bit issues for mass-production, an over 700-fold longer data retention characteristics at 105 can be expected while keeping the same failure rate (0.01 ppm) relative to the conventional OR-logical architecture. No significant Vt shifts ( 140 mV and 200 mV) were observed even after applying surge stress of +2200 V from I/O pad and 1000-times cycling of write and erase operations, respectively. In addition, 1024-bit CMOS-FUSE module has been embedded in the SoC without any additional area penalty by being laid out just beneath the power ring for SRAM macro and the stable memory read operation was verified at VDD=1.0 V under a severe I/O switching noise and an unstable VDD/GND condition in the power up sequence.

An architecture for a high-density nonvolatile memory with ferroelectric capacitors is proposed and simulated. The architecture includes: (1) the operation procedure for DRAM-like memory cells with a Vcc/2 common plate, (2) commands and pin arrangement compatible with those of DRAMs. The resulting ferroelectric memory is expected to show, in addition to nonvolatility, high performance in terms of speed, active power dissipation, and read endurance. In addition, the memory can be handled in the same way as DRAMs. The proposed basic operations are confirmed by using circuit simulations, in which an equivalent circuit model for ferroelectirc capacitors is incorporated. A problem remaining with the architecture is low write endurance due to fatigue along with polarization switching. Designing the reference-voltage generator for 1T1C (one-transistor and one-capacitor) cells, while considering signal reduction along with fatigue, will be another issue for achieving high-density comparable to that of DRAMs.

A new, simple test circuit for measuring the threshold voltage distribution of flash EEPROM cell transistors is described. This circuit makes it possible to perform a reliability test for a large number of memory cell transistors with easy static operation because it reduces the measuring time drastically. In addition, this circuit can measure the highest and lowest thresh-old voltages of memory cell transistors easily. This method is suitable for performing the reliability test, such as program/erase endurance test and data retention test, for a large number of flash memory cell transistors. The usefulness of this new test circuit has been confirmed by applying it to 64 Kbit NAND-type flash memory cell array.